Nikon

NSR 2205 i 12 D i-Line

Lithography Can produce wafer as-is Nikon NSR 2205 family

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NSR 2205 i 12 D i-Line — Inventory photo — Fig. 01NSR 2205 i 12 D i-LineInventory photo^[3]

Wafer size

Can produce wafer as-is

Power

208 V^[6]

What it is

The Nikon NSR 2205 i 12 D is an i-line stepper for photolithography. The Nikon NSR 2205 i 12 D handles wafers of 6-inch and 8-inch diameter.^[2]^[7]^[8]^[1]^[9]

How it works

General reference — not yet source-verified

A stepper projects the image of a reticle onto a photoresist-coated wafer through a reduction lens. The wafer stage steps between exposures to pattern each die. An alignment system overlays subsequent layers.

Where it fits in the process flow

General reference — not yet source-verified

Steppers are used in the photolithography step of semiconductor fabrication. The photolithography step occurs after wafer cleaning and photoresist coating. The photolithography step is followed by development and etching.

Applications

General reference — not yet source-verified

i-line steppers are commonly used for non-critical layers, power devices, MEMS, analog ICs, and other applications that do not require the finest geometries.

What do the numbers mean?

Power & electrical2

Voltage: 208 V^[6]
Phase: 3 Phase^[6]

Wafer handling13

Factory Interface: Open Cassette (2)^[1]; Vax Station, Pin Chuck^[1]
Handler Sytem: WL Type 3^[1]
Wafer size: 6 inch^[2]
Wafer size: 8 inch^[7]
Controller/chuck: Vax Station, Pin Chuck^[1]
Handler system: WL Type 3^[1]
Wafer Sizes: 6 inch, 8 inch^[2]
Vax station: Pin Chuck^[1]
Wafer size: Can produce wafer as-is^[6]
Wafer size: Wafer Handler^[6]
Handler options: SIC Substrate^[6]
Robot Type: OEM^[6]

Performance1

Uniformity: 0.93% (at most recent lamp change in May 2025)^[1]

Control & software1

Software Version: MCSV 2.41, OCSV 2.41^[1]

Dimensions & facilities1

CDA: N2^[6]

Configuration & options15

CIM: SECS^[1]
Process: Photolithography^[1]
Power: 674mW/cm2 (at most recent lamp change in May 2025)^[1]
TFD: 0.332um (July 2025)^[1]
Astigmatism: 0.259um (July 2025)^[1]
Tool type: i-Line Stepper^[2]
Category: i-line Stepper^[1]
Vintage: 1996, 1999^[1]
OEM: Nikon^[2]
Model: NSR 2205 i 12 D^[2]
Equipment type: i-Line Stepper^[2]
System SW (OS) Version: Nikon Nest^[6]
End Effecter Type: OEM^[6]
Supporting Equipment: STD OEM items^[6]
DIW: Chilled Water^[6]

Vintage & configurations

1996Vintage^[1]
1996 Vintage is stated for the 8-inch configuration.
1999Vintage^[2]
1999 Vintage is stated for the 6-inch configuration.

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What replaced it?

Alternatives

Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.

Canon FPA 2500 i 3 i-Line— Same function class: Lithography, nullCompare in depthsource^[2]

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Voltage208 V^[6]
Phase3 Phase^[6]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What is the process type of this tool?

The process is photolithography.^[1]

What factory interface is used?

The factory interface uses an open cassette system (two cassettes).^[1]

Not publicly documented

The following facts about the NSR 2205 i 12 D i-Line are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented variants, configuration options, or revision breakpoints of the NSR 2205 i 12 D i-Line are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the NSR 2205 i 12 D i-Line are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the NSR 2205 i 12 D i-Line are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the NSR 2205 i 12 D i-Line is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the NSR 2205 i 12 D i-Line are on record.
Answerable by: an OEM parts catalog or a service engineer