Brooks
017-0024-01 Prealigner
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
The Brooks 017-0024-01 is a prealigner used in semiconductor lithography.[1]
How it works
General reference — not yet source-verifiedA prealigner typically uses a combination of mechanical and optical sensors to detect the wafer's notch or flat and its outer edge.
The wafer is rotated while optical sensors measure its position, and the prealigner adjusts the wafer's orientation and centering.
Where it fits in the process flow
General reference — not yet source-verifiedIn the photolithography process flow, prealignment occurs after the wafer has been cleaned and coated with photoresist and before the wafer is loaded into the aligner or stepper.
Proper prealignment ensures that the wafer is presented consistently to the alignment stage, reducing the need for coarse alignment adjustments by the main tool.
Applications
General reference — not yet source-verifiedPrealigners are used in semiconductor fabrication for integrated circuits, as well as in other lithographic processes such as MEMS and LED manufacturing.
What do the numbers mean?
No specifications recorded yet
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Where are the manuals?
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Not publicly documented
Field notes
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Not publicly documented
The following facts about the 017-0024-01 Prealigner are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No specifications for the 017-0024-01 Prealigner are on record.
Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 017-0024-01 Prealigner are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 017-0024-01 Prealigner are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 017-0024-01 Prealigner are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 017-0024-01 Prealigner are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
Last updated Sep 23, 2026.
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