Comparison ledger
Brooks 017-0146-01 Prealigner, Nikon NSR 2205 i 12 D i-Line, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | |
|---|---|---|
| OEM | Brooks | Nikon |
| Category | Lithography | Lithography |
| Wafer size | — | Can produce wafer as-is |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 1996 Vintage · 1999 Vintage |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0146-01 Prealigner | Nikon NSR 2205 |
| Specifications | ||
| Software Version | — | MCSV 2.41, OCSV 2.41[1] |
| CIM | — | SECS[1] |
| Process | — | Photolithography[1] |
| Factory Interface | — | Open Cassette (2)[1] |
| Configuration | — | Vax Station, Pin Chuck[1] |
| Handler Sytem | — | WL Type 3[1] |
| Power | — | 674mW/cm2 (at most recent lamp change in May 2025)[1] |
| Uniformity | — | 0.93% (at most recent lamp change in May 2025)[1] |
| TFD | — | 0.332um (July 2025)[1] |
| Astigmatism | — | 0.259um (July 2025)[1] |
| Tool type | — | i-Line Stepper[2] |
| Wafer size | — | 6 inch[2] |
| Controller/chuck | — | Vax Station, Pin Chuck[1] |
| Handler system | — | WL Type 3[1] |
| Category | — | i-line Stepper[1] |
| Wafer Sizes | — | 6 inch, 8 inch[2] |
| Vintage | — | 1996, 1999[1] |
| OEM | — | Nikon[2] |
| Model | — | NSR 2205 i 12 D[2] |
| Equipment type | — | i-Line Stepper[2] |
| Vax station | — | Pin Chuck[1] |
| Voltage | — | 208 V[4] |
| Phase | — | 3 Phase[4] |
| Handler options | — | SIC Substrate[4] |
| System SW (OS) Version | — | Nikon Nest[4] |
| Robot Type | — | OEM[4] |
| End Effecter Type | — | OEM[4] |
| Supporting Equipment | — | STD OEM items[4] |
| CDA | — | N2[4] |
| DIW | — | Chilled Water[4] |
| Type | — | i-Line stepper[2] |
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