Tokyo Electron
Lithius Pro
The Tokyo Electron LITHIUS Pro is a 300mm wafer coater-developer for semiconductor lithography. The LITHIUS Pro supports ArF immersion, ArF, KrF, and i-line lithography processes. The LITHIUS Pro V variant achieves a maximum throughput of 250 wph.[1][2][3]
Performance
200 wph (upgradeable to 250 wph)[1]
Gas delivery
Coater / Developer[4]
Optics
With Rinse process at pre-/post exposure[4]
What it is
The Tokyo Electron (TEL) CLEAN TRACK LITHIUS Pro is a resist coater and developer used in semiconductor lithography processing. The LITHIUS Pro handles 300 mm wafers. The system is designed for immersion lithography processes. The LITHIUS Pro includes a rinse process applied before and after exposure.[4][3]
Where it fits in the process flow
General reference — not yet source-verifiedThe LITHIUS Pro is a piece of equipment used in the lithography process, one of the core front-end wafer fabrication steps. The coater-developer is placed upstream and downstream of the exposure tool: it coats wafers with photoresist before exposure and develops the latent image after exposure. The system typically operates inline with a stepper or scanner, forming a lithography cell.
What do the numbers mean?
Wafer handling1
Gas & chemistry2
Optics & imaging3
Performance2
- Throughput
- Maximum 250 wph capable in future; 200 wph capability with future upgradeability to 250 wph[1]
Control & software1
Configuration & options22
- Immersion COT and DEV[4]
- 1 Foup exchanger[4]
- 3BCT[4]
- 3COT[4]
- 3ITC[4]
- 6DEV[4]
- 3ADH[4]
- 12CGHA,[4]
- 6CPHP[4]
- 6CEHP,[4]
- 6CGHP[4]
- 3BST[4]
- 3PIR[4]
- 2WIS[4]
- 4SCPL[4]
- 6CPL[4]
- 2WEE[4]
Vintage & configurations
- 2025-12Announcement of LITHIUS Pro DICE[2]
TEL announced the new CLEAN TRACK LITHIUS Pro DICE in December 2025.
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| CLEAN TRACK LITHIUS Pro V | — | — | No differences from the base line stated in the source beyond the variant designation. | web.archive.org[1] |
| CLEAN TRACK LITHIUS Pro V-i | — | — | No differences from the base line stated in the source beyond the variant designation. | web.archive.org[1] |
| LITHIUS Pro V | — | — | High-productivity platform with 200 wph throughput upgradeable to 250 wph; optimized integration with exposure tool. | web.archive.org[1] |
| LITHIUS Pro V-i | — | — | Variation of LITHIUS Pro V; details not specified in sources. | web.archive.org[1] |
| LITHIUS Pro-i | — | — | Listed alongside LITHIUS Pro; likely a variant with i-line optimization. | web.archive.org[1] |
| LITHIUS Pro DICE | — | 2025 | Announced December 2025; features defect control technology reducing resist coating defects by 50% or more; world-class productivity; improved environmental performance. | tel.com[2] |
| LITHIUS Pro Z | — | — | Previous model provided for over a decade; preceded LITHIUS Pro DICE. | tel.com[2] |
What replaced it?
Alternatives
Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.
- SUSS MicroTec ACS 200 +— Same function class: Lithography, nullCompare in depthsource[5]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What wafer size does the LITHIUS Pro handle?
The LITHIUS Pro is configured for 300 mm wafers.[3]
Not publicly documented
The following facts about the Lithius Pro are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
The control-system platform and OS era of the Lithius Pro are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Lithius Pro are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Lithius Pro is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Lithius Pro are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the Lithius Pro are on record.
Answerable by: university cleanroom staff or an OEM application specialist
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]web.archive.org — tel.com (Oct 18, 2009)web.archive.org
- [2]tel.com — tel.comtel.com
- [3]macquarie.com — macquarie.commacquarie.com
- [4]Inventory photo
- [5]web.archive.orgweb.archive.org
Last updated Oct 5, 2026.
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