Oxford Instruments
Plasmalab 100 RIE
Plate 01Oxford Plasmalab System 100 RIE ,Reactive Ion Etch System semiconductor equipment
SemiStarWatch on YouTubePlate 02Oxford Plasmalab System 100 Reactive Ion Etch (RIE) #56082
Bid ServicellcWatch on YouTube
What it is
The Oxford Instruments Plasmalab 100 is a reactive ion etcher (RIE). The Oxford Instruments Plasmalab 100 is manufactured by Oxford Instruments Plasma Technology.[1][4][6][5]
The system is configured for semiconductor plasma etching applications including research and development, pilot production, and MEMS fabrication.[4][5]
How it works
The Plasmalab 100 RIE employs a 13.56 MHz RF generator with up to 600 W of power. The system has a water-cooled electrode that maintains a temperature range of 10°C to 80°C. The chamber is evacuated by a turbo pump backed by a dry mechanical pump.[5]
Where it fits in the process flow
The Plasmalab 100 RIE is configured as a load-locked system suitable for small batch processing in R&D and pilot production environments.[4]
Applications
What do the numbers mean?
Power & electrical2
Vacuum & pumping7
Wafer handling3
Gas & chemistry3
- Gas Box[1]
Control & software2
- Control Computer (no HDD)[1]
Configuration & options8
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Plasmalab 100 Plus | — | — | Allows small batch processing for R&D and Pilot Production; supports up to 8''/200 mm wafers; load-locked system | classoneequipment.com[4] |
| Plasmalab 100 RIE (FL) | — | — | Configured for SiO2 plasma etching; supports wafer sizes up to 300 mm; 330 mm platen; water-cooled electrode; Advanced Energy RFX 600A RF generator; Alcatel turbo pump; blue PLC control | semistarcorp.com[5] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Voltage208V, 50/60Hz[1]
- ConfigurationWith VAT PM-5 Adaptive Pressure Controller[1]
- ConfigurationAdixen ACT 1300M Turbopump Controller[1]
- ConfigurationLeybold D65BCS Vacuum Pump with Oil Filter & Exhaust Filter[1]
- ConfigurationGas Box[1]
- RF GeneratorAdvanced Energy RFX 600A, 600 W @ 13.56 MHz[5]
- Turbo PumpAlcatel ATH 400M[5]
- Turbo Pump ControllerAlcatel ACT 600M[5]
- Pressure ControllerVAT PM-5 Adaptive Pressure Controller[1]
- Number of Gas Lines6 (with MFCs)[5]
- Installed GasesAr, N2, CHF3, NF3, N2O[5]
- Vacuum PumpLeybold D65BCS Vacuum Pump with oil filter and exhaust filter[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Plasmalab 100 RIE are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Plasmalab 100 RIE are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Plasmalab 100 RIE are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Plasmalab 100 RIE are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Plasmalab 100 RIE is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Plasmalab 100 RIE are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (6)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]Inventory photo
- [4]classoneequipment.com — classoneequipment.comclassoneequipment.com
- [5]semistarcorp.com — semistarcorp.comsemistarcorp.com
- [6]OXFORD PLASMALAB 100 RIE | SemiStar — semistarcorp.comsemistarcorp.com
Last updated Aug 14, 2026.
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