Axcelis
200 ACU
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
How it works
General reference — not yet source-verifiedA plasma asher uses a reactive plasma environment to remove organic material from wafers and related surfaces.
An asher in this class is used as a dry process tool rather than a wet chemical cleaning station.
Where it fits in the process flow
Applications
What do the numbers mean?
Power & electrical2
Wafer handling2
Control & software1
Configuration & options11
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Is the Axcelis 200 ACU an asher?
Yes, the Axcelis 200 ACU is an asher, specifically a plasma asher.[1][2]
What is the part number for the control system of the Axcelis 200 ACU?
The computer system for the Axcelis 200 ACU has part number SC 4572 A.[4]
What are the electrical requirements of the Axcelis 200 ACU?
The Axcelis 200 ACU operates at 208 volts and 30 amps.[4]
Not publicly documented
The following facts about the 200 ACU are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 200 ACU are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 200 ACU are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 200 ACU are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 200 ACU are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 200 ACU is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]semistarcorp.com — semistarcorp.comsemistarcorp.com
- [3]wotol.com — wotol.comwotol.com
- [4]semistarcorp.com — semistarcorp.comsemistarcorp.com
- [5]Axcelis 200 ACU Asher | CapEx Outsource, LLC — capexoutsource.comcapexoutsource.com
Last updated Oct 7, 2026.
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