Nikon
i 12 D
Wafer size
Wafer Equipment
Performance
Focus Calibration Repeatability:[1]
Optics
Within 100 nm ((3σ) )[1]
What it is
How it works
Where it fits in the process flow
General reference — not yet source-verifiedSteppers such as the i 12 D are used in the photolithography step of semiconductor manufacturing, where the circuit pattern is transferred from the reticle to the wafer.
Applications
What do the numbers mean?
Wafer handling1
Gas & chemistry1
Optics & imaging12
- Within 100 nm ((3σ) )[1]
- Lens Distortion (Including Magnification Error):[1]
- Within ± 40 nm 37 points / chip[1]
- Magnification Control:[1]
- Within ± 15 nm[1]
- Maximum Exposure Area:[1]
- Exposure Power:[1]
- Integrated Exposure Stability (including integrated exposure matching):[1]
- Within 100 nm (3σ)[2]
- Lens Distortion (Including Magnification Error): - Within ± 40 nm 37 points / chip[2]
Performance1
- Focus Calibration Repeatability:[1]
Configuration & options10
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Resolution0.35μm or less (High resolution, positive resist film of 1.0μm thickness )[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the i 12 D are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the i 12 D are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the i 12 D are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the i 12 D are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the i 12 D are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the i 12 D is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]dealer listingwotol.com
Last updated Sep 22, 2026.
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