Lam Research
2300 Exelan Flex Dielectric
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Lam 2300 Exelan Flex is a dielectric etch system. The Lam 2300 Exelan Flex is designed for sub-90nm technology nodes. The Flex variant adds a 60MHz ICP source for low-k etch at sub-65nm nodes.[1][2][3][4]
What it is
How it works
The 2300 Exelan Flex uses a radio-frequency (RF) inductively coupled plasma (ICP) source. The Flex variant operates with a 60 MHz ICP, while related variants use a 13.56 MHz source. The RF matching network is a component of the RF delivery system.[1]
Where it fits in the process flow
General reference — not yet source-verifiedThe dielectric etch step typically follows the deposition of an insulating layer and the patterning of a photoresist mask that defines the areas to be removed. After etching, the remaining mask is stripped, and the wafer proceeds to subsequent manufacturing stages.
Applications
The 2300 Exelan Flex is used for etching dielectric materials including silicon dioxide, silicon nitride, and low-k dielectrics.[1]
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Used Exelans lack modern diagnostics like in-situ OES monitoring.
What do the numbers mean?
Power & electrical1
Wafer handling1
Configuration & options2
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| 2300 Exelan HP (High Productivity) | — | — | Uses 13.56MHz ICP source with 3000W max power; ideal for oxide etch at 90nm. May lack 60MHz ICP for low-k etch. | caladansemi.com[1] |
| Exelan Classic (pre-2005) | — | — | Pre-2005 variant; lacks sub-100nm uniformity. Avoid for sub-100nm nodes. | caladansemi.com[1] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ICP source frequency13.56MHz for Exelan HP; 60MHz for Flex variant[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the Lam Research 2300 Exelan Flex?
The Lam Research 2300 Exelan Flex is a semiconductor manufacturing tool classified as a dielectric etch system.[2][3][1]
What power source does the Exelan Flex use?
The Exelan Flex uses an inductively coupled plasma (ICP) source. The Flex variant adds a 60 MHz ICP.[1]
What are the main components maintained in the vacuum chamber?
Maintained components in the vacuum chamber include the chamber liners, the e-chuck, heater coils, and the heater plate.[5]
What dielectric materials can the system etch?
The system is used for etching oxide, nitride, and low-k dielectric materials.[1]
Not publicly documented
The following facts about the 2300 Exelan Flex Dielectric are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 2300 Exelan Flex Dielectric are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the 2300 Exelan Flex Dielectric are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the 2300 Exelan Flex Dielectric is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 2300 Exelan Flex Dielectric are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the 2300 Exelan Flex Dielectric are on record.
Answerable by: university cleanroom staff or an OEM application specialist
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]caladansemi.com — caladansemi.comcaladansemi.com
- [2]Equipment inventory listing
- [3]LAM Research 2300 Exelan Flex Dielectric Etch for sale — fabsurplus.comfabsurplus.com
- [4]fabsurplus.com — fabsurplus.comfabsurplus.com
- [5]https://www.foamtecintlwcc.com/wp-content/uploads/2023/09/lam-2300-flex-oxide-etch.pdf — foamtecintlwcc.comfoamtecintlwcc.com
Last updated Oct 2, 2026.
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