Applied Materials
eMax CT Plus Dielectric
Applied Materials eMax CT Plus Dielectric is a dielectric etch chamber for semiconductor processing. Applied Materials eMax CT Plus Dielectric uses a bias of 13.5 MHz and 2 MHz LF, a 60 MHz Daihen source, and an Alcatel ATH 1600 M turbo pump. Applied Materials eMax CT Plus Dielectric includes an RF match box, an RF generator, and a Nor-Cal / NC-95-PP gate valve.[1][2]
What it is
How it works
Applied Materials eMax CT Plus Dielectric is configured with an Alcatel ATH 1600 M turbo pump, an RF match box, a bias supply at 13.5 MHz and 2 MHz, a Daihen RMN-50N1 low-frequency bias unit, a Daihen AMN-30 H 60 MHz source, a Nor-Cal NC-95-PP gate valve, eFib and wFib fiber options, and a chamber equipment cart.[1][2]
Where it fits in the process flow
General reference — not yet source-verifiedApplied Materials eMax CT Plus Dielectric sits in the etch portion of semiconductor manufacturing after film deposition and patterning steps that define where material is to be removed.
Applied Materials eMax CT Plus Dielectric supports dielectric etch processing rather than front-end wafer formation or back-end assembly.
Applications
What do the numbers mean?
Power & electrical6
Vacuum & pumping2
- Alcatel ATH 1600 M Turbo Pump[1]
Configuration & options5
- Chamber Equip Cart[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the eMax CT Plus Dielectric are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the eMax CT Plus Dielectric are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the eMax CT Plus Dielectric are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the eMax CT Plus Dielectric are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the eMax CT Plus Dielectric are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the eMax CT Plus Dielectric is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]eMax CT Plus Dielectric — Applied Materials | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 11, 2026.
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