Comparison ledger
Applied Materials eMax CT Plus Dielectric, Axcelis 200 ACU, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | eMax CT Plus DielectricApplied Materials | 200 ACUAxcelis |
|---|---|---|
| OEM | Applied Materials | Axcelis |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials eMax | Axcelis NV GSD 200 |
| Specifications | ||
| Configuration | Alcatel ATH 1600 M Turbo Pump[1] | Parts Machine[2] |
| Bias | 13.5 MHz (Bias) & 2 MHz (LF Bias)[1] | — |
| LF Bias | Daihen RMN-50N1[1] | — |
| Source | Daihen AMN-30 H 60 MHz[1] | — |
| Gate Valve | Nor-Cal / NC-95-PP[1] | — |
| FIB | eFib, wFib[1] | — |
| Turbo Pump | Alcatel ATH 1600 M[1] | — |
| RF Match Box | Included[1] | — |
| RF Generator | Included[1] | — |
| Chamber Equip Cart | Included[1] | — |
| Manufacturer | — | Axcelis[2] |
| Model | — | 200 ACU[2] |
| Tool type | — | Asher[2] |
| Wafer size | — | 200mm[4] |
| Serial number | — | AU6A356AH[4] |
| Computer system | — | M 200 PC, M 200[5] |
| Part number | — | SC 4572 A[5] |
| Volts | — | 208[5] |
| Amps | — | 30[5] |
| Equipment type | — | Asher[2] |
| Wafer configuration | — | 8 inch[3] |
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