Tokyo Electron Unity II E 85

Models in this family

1. Unity II E 85 DD

   The Tel Unity II E 85 DD is an 8-inch oxide etch system.

2. Unity II E 85 DPA

   The Tokyo Electron Unity II E 85 DPA is a semiconductor equipment model for 8-inch wafer processing.

3. Unity II E 85 DPA Dry

   Tokyo Electron Unity II E 85 DPA is a dry etching system configured for 8-inch wafers.

4. Unity II E 85 TPATC

   The Tokyo Electron Unity II E 85 TPATC is a dry etcher for 8-inch wafers.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Unity II E 85 TPATC Dry	—	—	—	waferpedia.com[1]

5. Unity II E 85 TPATC Dry

   Tokyo Electron Unity II E 85 TPATC is a dry etcher for 8-inch wafers.

Sources