Waferpedia

Wafer size

300mm

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39 entries

  1. 12-2P-CPYES

    The YES 12-2P-CP is a manual-load high-temperature cure oven for MEMS and semiconductor process applications.

    CategoryThermal / DiffusionWafer300mm
  2. EDC-HL-15Laurell

    The Laurell EDC-HL-15 B is a 650-series EDC spin processor that accommodates up to 300 mm wafers and 9" × 9" substrates.

    CategorySpin coaterWafer300mm
  3. ACS 300 Gen 2SUSS MicroTec

    The SUSS ACS 300 Gen 2 is a coater/developer system.

    CategoryThermal / DiffusionWafer300mm
  4. PBX4-300YES

    The YES PBX4-300 is a fully automated 300mm and 200mm polyimide/BCB/copper anneal and vacuum bake system from Yield Engineering Systems.

    CategoryThermal / DiffusionWafer300mm
  5. ACS300 Gen3SUSS MicroTec

    The ACS300 Gen3 is an automated coating and developing system for wafers up to 300 mm.

    Wafer300mm
  6. Twinscan XT 1950 HiASML

    ASML Twinscan XT 1950 Hi is a scanner for 12-inch wafers used for 193 nm immersion lithography with 38 nm resolution capacity.

    CategoryLithographyWafer300mm
  7. NS300ZTokyo Electron

    Tokyo Electron NS300Z is a scrubber system for 300mm wafers, featuring process modules with proven reliability and stability, and offering further productivity improvements.

    CategoryWet Processing / CleanWafer300mm
  8. AS8 / 12SUSS MicroTec

    The SUSS MicroTec AS8 / 12 is a manual coating and developing system for wafers up to 300 mm, with spray coating as its primary process.

    Wafer300mm
  9. DSC300 Gen2SUSS MicroTec

    The SUSS MicroTec DSC300 Gen2 is an automated full-field scanning projection lithography system for wafers up to 300 mm.

    CategoryLithographyWafer300mm
  10. ELP300 Gen2SUSS MicroTec

    The SUSS MicroTec ELP300 Gen2 is an automated excimer laser processing system for substrates up to 300 mm, used for ablation, laser-assisted debonding, and seed layer removal.

    Wafer300mm
  11. ELD300SUSS MicroTec

    The ELD300 is a semi-automated excimer laser-assisted debonding system for wafers up to 300 mm.

    CategoryPackaging & BondingWafer300mm
  12. AD12SUSS MicroTec

    The SUSS MicroTec AD12 is a manual system for aqueous developing and wafer cleaning, handling wafers up to 300 mm.

    Wafer300mm
  13. MA300 Gen2SUSS MicroTec

    The MA300 Gen2 is an automated mask aligner from SUSS MicroTec for proximity exposure of wafers up to 300 mm.

    CategoryLithographyWafer300mm
  14. Surfscan SP 2 Particle DefectKLA

    The KLA Surfscan SP 2 is a particle defect inspection system for semiconductor wafers.

    CategoryMetrology & InspectionWafer300mm
  15. Ultra-55Zeiss

    The Zeiss Ultra-55 SEM is used as the platform for Zyvex S-100 Nanoprobes.

    CategoryLithographyWafer300mm
  16. 300 Bake PlateCEE

    The CEE Apogee 300 Bake Plate is a semiconductor wafer bake plate for up to 300mm wafers with recipe-controlled thermal processing and DataStream™ logging.

    CategoryThermal / DiffusionWafer300mm
  17. ConX300Asyst

    Asyst ConX300 is a connectivity software solution for semiconductor equipment manufacturers supporting 300mm fabs and 200mm fab upgrades.

    CategoryConnectivity softwareWafer300mm
  18. 300mm-OfenDespatch

    Despatch 300mm-Ofen is a 300mm thermal process tool for clean processing.

    CategoryWet Processing / CleanWafer300mm
  19. IVS 380 SystemOnto Innovation

    The IVS 380 System performs overlay, CD, and height metrology for 300mm wafers.

    CategoryMetrology & InspectionWafer300mm
  20. AST-1100Despatch
    CategoryThermal / DiffusionWafer300mm
  21. EDC-650-15Laurell

    The Laurell EDC-650-15 is a station-mounted 650-series spin processor that accommodates up to 300 mm wafers and 9" × 9" substrates.

    CategorySpin coater / spin processorWafer300mm
  22. 300Novellus

    Novellus ATHENA software is available for Novellus 300 mm tools that use the Proteus user interface.

    CategoryWet Processing / CleanWafer300mm
  23. SMIF-300Asyst

    Asyst SMIF-300 is a 300 mm SMIF and isolation technology product series for integrated fab solutions.

    CategorySMIF / isolation / wafer management systemWafer300mm
  24. 58TAYES

    The YES-58TA is a vacuum bake, HMDS vapor prime, and image reversal system that uses NH3 vapor for image reversal processing.

    CategoryThermal / DiffusionWafer300mm
  25. PBV-300YES

    The PBV-300 is a YES polyimide/BCB vacuum cure oven line for 300mm and 200mm processing. The PBV-300 is placed in the Thermal / Diffusion category.

    CategoryThermal / DiffusionWafer300mm
  26. PB12YES

    The YES PB12 is a PB-HV Series manual-load high vacuum oven, stated to support up to 300 mm wafers and to be designed for MEMS and semiconductor process applications.

    CategoryThermal / DiffusionWafer300mm
  27. 300Cascade Microtech

    Cascade Microtech 300 is a 300 mm on-wafer probe system line for advanced test applications.

    CategoryTest & ProbeWafer300mm
  28. WS-650-15BLaurell

    The Laurell WS-650-15B is a spin coater in the 650 Series.

    CategoryResist ProcessingWafer300mm
  29. EDC-HL-15 BLaurell

    The Laurell EDC-HL-15 B is an EDC™ System spin coater in the 650-series. The Laurell EDC-HL-15 B accepts a maximum substrate size of 300mm (9" x 9") and reaches 12000 rpm.

    CategoryResist ProcessingWafer300mm
  30. E25Rudolph

    The Rudolph E25 System is an automated wafer edge top and edge normal inspection system for 300 mm wafers.

    CategoryMetrology & InspectionWafer300mm
  31. EDC-650-15BLaurell

    The Laurell EDC-650-15B is an EDC System spin coater. The Laurell EDC-650-15B supports a maximum substrate size of 300 mm (9" x 9").

    CategoryResist ProcessingWafer300mm
  32. H6-15 BLaurell

    The Laurell H6-15 B is a spin coater in the 650-series. The Laurell H6-15 B supports a maximum substrate size of 300mm (9" x 9") and a maximum speed of 12000 rpm.

    CategoryResist ProcessingWafer300mm
  33. Gen-6Sonoscan

    The Sonoscan Gen-6 is a C-mode Scanning Acoustic Microscope with scanning capability for JEDEC trays or a 300mm wafer.

    CategoryMetrology & InspectionWafer300mm
  34. SE600CHA

    The JEOL JBX-9500FS Electron Beam Lithography System can load substrates from 10 mm pieces to 300 mm wafers and write features less than 10 nm in size.

    CategoryLithographyWafer300mm
  35. H6-15Laurell

    The Laurell H6-15 is a compact HL Series spin coater designed for glove box use and specified to accommodate up to ø 300mm wafers and 9" × 9" substrates.

    CategorySpin coaterWafer300mm
  36. WS-650-15Laurell

    The Laurell WS-650-15 is a station-mounted spin coater in the 650-series that accommodates up to 300mm wafers and 9" × 9" substrates and reaches a maximum rotational speed of 12,000 RPM.

    CategorySpin coaterWafer300mm
  37. Gemini Automated Production FusionEV Group

    The EVG Gemini Automated Production Fusion Bonder is a 300mm bonding system with automated handling, recipe programming, and alignment capabilities.

    CategoryPackaging & BondingWafer300mm
  38. 450 PB 12 PolyimideYES

    The Yes 450 PB 12 Polyimide Bake Oven is a batch process bake oven with capacity for two 25-wafer cassettes and 300mm FOUPs.

    CategoryThermal / DiffusionWafer300mm
  39. WS-650-15 BLaurell

    The Laurell WS-650-15 B is a 650-series spin coater for resist processing that accommodates up to 300mm wafers and reaches 12,000 RPM.

    CategoryResist ProcessingWafer300mm