EDC-650-15

The Laurell EDC-650-15 B is a compact spin processor belonging to Laurell's 650-series EDC product line. The system accommodates substrates up to 300 mm in diameter and 229 mm by 229 mm square substrates. Although the drive is capable of 12,000 RPM with vacuum hold-down, the manufacturer recommends operation at 3,000 RPM and use of non-vacuum chucks. The system features a microprocessor-based 650-series process controller that allows real-time operator interaction, downloadable firmware updates, and optional PC-based control via Spin 3000 software. The housing is typically made from a proprietary solid co-polymer blend resistant to solvents and strong acids and bases. The process chamber uses an internal bowl shape with a bottom gutter and a clear dome lid. Safety certifications include ETL, UL, CSA, CE, and RoHS compliance.^{[1][2][3][4][5]}

The EDC-650-15 B uses a proprietary labyrinth seal that provides nitrogen purge to protect the motor and electronics from chemical contamination. The process chamber is electrically interlocked so that rotation and dispensing are disabled when the lid is open. An adjustable down-flow exhaust and drain monitors the chamber's atmospheric balance for repeatability. A bowl-wash and dry routine can be added to each process. The 650-series controller monitors exhaust pressure and optionally other parameters such as temperature and pH. The system's process safeguard prevents the same process from being run twice on the same substrate without opening the lid.^{[1][2][3][4][5]}