Oxford Instruments
80s
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What it is
The Oxford 80s is an open-load reactive ion etching system.[1]
The Oxford 80s is configured for etching silicon-based films with fluorocarbon gases.[1]
How it works
Where it fits in the process flow
The Oxford 80s is used when patterned removal of silicon-based films is required.[1]
Applications
The Oxford 80s is used for etching silicon-based films.[1]
The Oxford 80s uses fluorocarbon gases in its etch configuration.[1]
- Etching of silicon based films
What do the numbers mean?
Gas & chemistry1
Configuration & options3
- Open load[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Gas ChemistryFluorocarbon gases[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the 80s are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 80s are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 80s are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 80s are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 80s are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 80s is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]cnf.cornell.edu — cnf.cornell.educnf.cornell.edu
Last updated Oct 9, 2026.
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