Lam Research

Rainbow 4528B SN2907

Etch 8-inch Lam Research Rainbow 4528B SN2907 family

Research Quality: 40% complete

Fig. — Manufacturer logo, not a photo of this toolWikimedia Commons (see file page for license)

What it is

The Lam Rainbow 4528B is a plasma etch system produced by Lam Research. The Rainbow 4528B is classified as a plasma etch tool. The system is configured for wafers of 8-inch diameter.^[1]^[2]

How it works

General reference — not yet source-verified

Plasma etch systems generate a plasma from process gases within a vacuum chamber. The plasma contains reactive ions and radicals that chemically react with the wafer material to remove it selectively. The system controls gas flow, chamber pressure, and radio-frequency power to achieve the desired etch profile.

Where it fits in the process flow

General reference — not yet source-verified

Plasma etch tools are typically used after photolithography to transfer patterns into underlying films. The etch step removes material from areas not protected by the photoresist mask. Downstream steps include photoresist stripping and wafer cleaning.

What do the numbers mean?

Wafer handling1

Wafer Size: 8-inch^[1]

Configuration & options9

Condition: Good Condition,. Sell it at AS IS ,Where Is term.^[1]
Quantity: 1 set^[1]
Valid Time: Subject to prior sale^[1]
Lead Time: Ready to go^[1]
Category: Plasma Etch^[1]
Original Equipment Manufacturer: Lam Research^[1]
Warranty: N/A^[1]
Refund: N/A^[1]
Inspection: Against appointment^[1]

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Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the Rainbow 4528B SN2907 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Rainbow 4528B SN2907 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Rainbow 4528B SN2907 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Rainbow 4528B SN2907 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Rainbow 4528B SN2907 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Rainbow 4528B SN2907 is not on record.
Answerable by: an OEM datasheet or a fab qualification report