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Lam Research

Concept One 200

DepositionLam Research Concept One 200 family
Research Quality: 20% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

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What it is

The Lam / Novellus Concept One 200 is a chemical vapor deposition CVD system.[3][2]

What do the numbers mean?

Wafer handling1

Wafer Size
200 mm (8 inch)[2]
Accurate?

Configuration & options1

TEOS[1]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
Concept One 200 CVD—1992—Equipment inventory listing[3]
Concept One 200 PECVD——PECVD (Plasma-Enhanced) variant for TEOS depositionEquipment inventory listing[1]
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What replaced it?

Alternatives

Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What types of deposition does the Concept One 200 perform?

The system is available in both standard chemical vapor deposition (CVD) and plasma-enhanced chemical vapor deposition (PECVD) configurations.[3][1][2]

Not publicly documented

The following facts about the Concept One 200 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • Fewer than 3 independently cited specifications for the Concept One 200 are on record; the remainder await public documentation.

    Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Concept One 200 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the Concept One 200 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Concept One 200 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Concept One 200 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing
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Last updated Sep 28, 2026.

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