KLA
2213-75 TSLKTB Argon
The KLA 2213-75 TSLKTB Argon is a refurbished argon laser. The KLA 2213-75 TSLKTB Argon is compatible with KLA AIT II and XP series systems, specifically AIT II, AIT XP, and AIT XP+. The KLA 2213-75 TSLKTB Argon carries the KLA part number 2213-75TSLKTB.[1][2]
What it is
General reference — not yet source-verifiedArgon lasers are gas lasers that emit light at specific wavelengths in the visible and ultraviolet spectrum. In wafer inspection systems, such lasers serve as high-intensity light sources for illuminating the wafer surface to detect defects and particulates.
Where it fits in the process flow
Applications
General reference — not yet source-verifiedArgon lasers in wafer inspection are used for detecting surface defects, particles, and contamination on wafers. The high-intensity, coherent light enables sensitive brightfield and darkfield imaging.
Applications include in-line process monitoring and quality control in semiconductor fabrication, especially for advanced node manufacturing where defect detection at high resolution is critical.
What do the numbers mean?
Optics & imaging1
Configuration & options7
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the 2213-75 TSLKTB Argon are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 2213-75 TSLKTB Argon are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 2213-75 TSLKTB Argon are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 2213-75 TSLKTB Argon are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 2213-75 TSLKTB Argon are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 2213-75 TSLKTB Argon is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]2213-75 TSLKTB Argon — KLA | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
- [3]KLA 2213-75 TSLKTB Argon family | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 10, 2026.
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