KLA

.204 PSL Wafer

Metrology & Inspection KLA .204 PSL Wafer family

Research Quality: 30% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The KLA .204 PSL Wafer is an 8-inch NIST-traceable reference wafer. The KLA .204 PSL Wafer is compatible with Surfscan 6xy0 and Sp1 particle counters.^[1]^[2]

KLA.204 PSL Wafer

No photo available yet

What it is

The KLA .204 PSL Wafer is an eight-inch NIST-traceable reference wafer used for calibrating particle detection systems. The KLA .204 PSL Wafer is compatible with Surfscan 6xy0 and Sp1 particle counters.^[1]^[2]^[3]

Where it fits in the process flow

General reference — not yet source-verified

The KLA .204 PSL Wafer is used in the metrology and inspection segment of semiconductor manufacturing, specifically for calibrating particle detection tools. The wafer is employed as a reference standard during tool qualification, periodic recalibration, and sensitivity verification of surface inspection systems.

What do the numbers mean?

Wafer handling1

Wafer Size: 8 inch^[1]

Configuration & options6

NIST Traceable^[1]; Capable on Surfscan 6xy0 and Sp1^[1]
Traceability: NIST^[3]
Compatible Tools: Surfscan 6xy0, Sp1^[1]
NIST Traceable: Yes^[1]
Compatible Tools: Surfscan 6xy0 and Sp1^[1]

Interested in this tool?

Need help with this tool?Embed spec card

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Worked with this tool? Help preserve its knowledge →

Frequently asked questions

What wafer size is the KLA .204 PSL Wafer?

The KLA .204 PSL Wafer is an 8-inch wafer.^[1]^[2]

What inspection tools is the KLA .204 PSL Wafer compatible with?

The wafer is compatible with Surfscan 6xy0 and SP1 tools.^[1]^[2]

Is the KLA .204 PSL Wafer NIST traceable?

Yes, the wafer is NIST traceable.^[1]^[2]

Not publicly documented

The following facts about the .204 PSL Wafer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the .204 PSL Wafer are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the .204 PSL Wafer are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the .204 PSL Wafer are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the .204 PSL Wafer are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the .204 PSL Wafer is not on record.
Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (6)Every fact above is drawn from these public sources

[1]inventory listing
[2].204 PSL Wafer — KLA | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
[3]waferpedia.com — waferpedia.comwaferpedia.com
[4]KLA .204 PSL Wafer vs KLA 2135 | Waferpedia — waferpedia.comwaferpedia.com
[5]KLA .204 PSL Wafer vs KLA Alpha Step 500 | Waferpedia — waferpedia.comwaferpedia.com
[6]KLA .204 PSL Wafer vs KLA P 22 Surface | Waferpedia — waferpedia.comwaferpedia.com