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Manufacturer

KLA

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579 entries

  1. 200KLA

    The KLA 200 series is a pattern inspection station used for reticle and photomask inspection.

    CategoryMetrology & Inspection
  2. FT 750KLA

    The KLA FT-750 is a visible light spectrophotometer-based thin film measurement system for semiconductor process control.

    CategoryLithography
  3. Alpha Step D 300 StylusKLA

    The KLA AlphaStep D-300 is a stylus-based surface profiler that measures step heights from 50 nm to 300 µm.

    CategoryMetrology & Inspection
  4. PN: 29 0177 Window, Lamp HouseKLA

    KLA PN: 29 0177 Window, Lamp House is a fused silica part stated to be capable of working on KLA UV 1xy0.

    CategoryMetrology & Inspection
  5. F 60KLA

    KLA F 60 is a film thickness measurement tool used in semiconductor metrology and inspection.

    CategoryMetrology & Inspection
  6. 1.112 PSL WaferKLA

    The KLA 1.112 PSL Wafer is an 8-inch NIST-traceable reference wafer compatible with Surfscan 6xy0 and Sp1 inspection systems.

    CategoryMetrology & Inspection
  7. SLF 17KLA

    The KLA SLF 17 is an inspection system.

    CategoryMetrology & Inspection
  8. Candela CS 2 SurfaceKLA

    KLA Candela CS 2 Surface is a metrology and inspection tool described as a surface inspection system and surface analyzer.

    CategoryMetrology & Inspection
  9. Archer 300 OverlayKLA

    The KLA Archer 300 is an overlay metrology system for optical overlay measurements on 300mm wafers.

    CategoryMetrology & Inspection
  10. 8100 XP CD-SEMKLA

    The KLA 8100 XP is a critical dimension scanning electron microscope (CD-SEM) designed for automated CD measurements on silicon wafers and reticles, featuring production-proven electron optics for bottom imaging of high aspect ratio structures.

    CategoryMetrology & Inspection
  11. Surfscan SP 1KLA

    The KLA Surfscan SP 1 is a wafer inspection tool from KLA-Tencor used for defect detection and surface quality inspection on polished wafers, epi wafers, and engineered substrates.

  12. Alpha Step D 500 Wafer Profiler MeterKLA

    The KLA Alpha Step D 500 Wafer Profiler Meter is a stylus profiler for 2D step height measurement, roughness, bow, and stress metrology.

    CategoryMetrology & Inspection
  13. D600KLA

    The KLA Tencor D600 is a stylus surface profiler for thin and thick film step height measurement.

    CategoryMetrology & InspectionWafer2"
  14. Surfscan 6XY0 TrainingKLA

    KLA Surfscan 6 XY 0 Training is an equipment entry identified by model Surfscan 6 XY 0.

  15. Candela CS 20 R Dual SurfaceKLA
    CategoryMetrology & Inspection
  16. Inspex EagleKLA

    The KLA Inspex Eagle Tester is a wafer handling and inspection system with 6-inch chuck and prealigner, 4-inch to 8-inch wafer capability, cassette-to-cassette handling, two ports, and a Zeiss microscope.

    CategoryTest & ProbeWafer8"
  17. P 16 SurfaceKLA

    The KLA P 16 Surface is a surface profilometer described as a fully refurbished unit with Windows XP, extended range up to 1 mm, and a 3D option.

    CategoryMetrology & Inspection
  18. Surfscan SP 1 TBI KeyboardKLA

    The KLA Surfscan SP 1 TBI Keyboard is a keyboard-only replacement part for the KLA Surfscan SP 1 TBI system.

    CategoryMetrology & Inspection
  19. Surfscan SP 1 Classic Particle DefectKLA

    The KLA Surfscan SP 1 Classic Particle Defect System is a particle defect inspection system for 6-inch and 8-inch wafers.

    CategoryMetrology & Inspection
  20. P 16 + ProfilerKLA

    KLA P 16 + Profiler is a metrology and inspection tool with listed wafer sizes from 2 inch to 12 inch.

    CategoryMetrology & Inspection
  21. Surfscan 7700 Particle DefectKLA

    The KLA Surfscan 7700 is a particle defect inspection system.

    CategoryMetrology & Inspection
  22. Candela CS 10 R Wafer InspectorKLA

    The KLA Candela CS 10 R Wafer Inspector is a single-phase wafer inspector with a 50/60 Hz, 5 A power specification and a booting upgrade requirement.

    CategoryMetrology & Inspection
  23. SL 305KLA
  24. TP 500 Implant Dose MeasurementKLA

    The KLA / Therma-wave TP 500 is an implant dose measurement tool used in ion implantation.

    CategoryIon Implantation
  25. RS 35 A Sheet Resistance MeasurementKLA
    CategoryMetrology & Inspection
  26. SCD 100 Film Thickness MeasurementKLA

    The KLA SCD 100 is a film thickness measurement tool.

  27. 5100 Overlay MeasurementKLA

    The KLA 5100 Overlay Measurement System is an overlay measurement system with an 8-inch wafer size.

    CategoryMetrology & Inspection
  28. PCA 54.0294 Turret Servo DriverKLA

    The KLA PCA 54.0294 Turret Servo Driver is a turret servo driver manufactured by KLA under the model designation PCA 54.0294.

    CategoryLab & Support Equipment
  29. RS 100 PartsKLA
    CategoryMetrology & Inspection
  30. F 5 X PartsKLA
  31. 215-0591KLA

    KLA model 215-0591 is a Power Adapter.

  32. 215-0509KLA

    The 215-0509 Power Adapter is a power adapter listed by KLA Instruments.

  33. 4PP-TypeAKLA

    The KLA 4PP-TypeA is a four-point probe.

    CategoryTest & Probe
  34. Counterweight-10x/20xNikonDIKLA

    The Counterweight-10x/20xNikonDI is a product offered by KLA Instruments. The product is listed in the KLA Instruments collection. No technical specifications are provided in the source.

  35. 4PP-TypeEKLA
  36. 4PP-TypeIKLA

    The KLA 4PP-TypeI is a resistance probe product listed in the KLA Instruments product collection.

  37. 4PP-TypeDKLA

    The KLA 4PP-TypeD is a resistance probe product listed in the KLA Instruments online store.

  38. TP 420 Implant Dosing MeasurementKLA
    CategoryIon Implantation
  39. Counterweight-50x-100xNikonDIKLA

    The Counterweight-50x-100xNikonDI is a KLA Instruments spare part listed in the KLA Instruments online store.

  40. Candela 8520 SurfaceKLA

    The KLA Candela 8520 Surface is a surface inspection system for wafer inspection on 6-inch and 8-inch wafers.

    CategoryMetrology & Inspection
  41. CondWafer-4PPKLA

    The KLA CondWafer-4PP is a product listed in the KLA Instruments online store.

  42. Surfscan SP 5 Particle DefectKLA

    The KLA Surfscan SP 5 Particle Defect System is a bare wafer inspection station configured for 12-inch wafers.

    CategoryMetrology & InspectionWaferBare Wafer Inspection Station
  43. Surfscan SP 3 Particle DefectKLA

    The KLA Surfscan SP 3 Particle Defect System is a bare wafer inspection station for 12-inch wafers with DUV illumination.

    CategoryMetrology & InspectionWaferBare wafer inspection station
  44. eV 300KLA

    KLA eV 300 is an advanced, fully automated scanning electron microscope defect review tool for manufacturing environment use.

    CategoryMetrology & Inspection
  45. OmniMap RS55KLA

    The KLA-Tencor Omnimap RS55/TC is a semiconductor equipment manufactured by KLA-Tencor and supports 8-inch wafers.

  46. Aleris HX 8500 Ellipsometry MeasurementKLA

    The KLA Aleris HX 8500 is an ellipsometry measurement tool introduced in 2008.

    CategoryMetrology & Inspection
  47. 2350KLA

    The KLA 2350 is an inspection system.

    CategoryMetrology & Inspection
  48. 6220KLA

    The KLA 6220 is a particle inspection and bare wafer surface defect inspection system.

  49. 1007KLA

    The KLA 1007 is a wafer prober manufactured by KLA.

    CategoryTest & Probe
  50. MicroSense UMSC 200 BT MeasurementKLA

    The KLA / MicroSense UMSC 200 BT Measurement System is a non-contact measurement system for flatness and thickness measurement.

    CategoryMetrology & Inspection
  51. 7600 Patterned Wafer Particle DefectKLA

    The KLA 7600 Patterned Wafer Particle Defect is a metrology and inspection system configured for a 25 Wafer Slot Cassette.

    CategoryMetrology & InspectionWafer25 Wafer Slot Cassette
  52. HRP 220 SurfaceKLA

    The KLA HRP 220 Surface is a surface profilometer.

    CategoryMetrology & Inspection
  53. Puma 9120KLA

    The KLA Puma 9120 is a dark-field defect detection tool for semiconductor wafer inspection. The KLA Puma 9120 is configured for 200 mm and 300 mm wafers and has two cameras.

  54. F 80 c 300 Film Thickness MeasurementKLA

    The KLA / Filmetrics F 80 c 300 is a film thickness measurement tool.

  55. P-7KLA

    KLA P-7 is a research grade stylus profiler for surface metrology and measurement.

    CategoryMetrology & Inspection
  56. INS 2000KLA
  57. F 40 Thin Film Thickness MeasurementKLA

    The KLA Filmetrics F40 is a microscope-based thin-film measurement instrument that uses spectral reflectance technology to measure thickness and optical constants.

  58. MZ 6KLA
  59. ACE 600 High VacuumKLA

    The Leica ACE 600 is a high vacuum coating system for electron microscopy sample preparation, equipped with a configurable metal process chamber and multiple coating sources.

  60. Candela CS 20 RKLA

    The KLA Candela CS 20 R is a metrology and inspection system for wafer inspection.