KLA
2135
The KLA 2135 is a wafer inspection system that uses advanced sensor and image processing technologies to detect yield-relevant defects on all process layers. The KLA 2135 uses KLA's brightfield, small-pixel, high data rate, digital image processing technology for defect detection. The KLA 2135 offers a two- to three-times throughput improvement over the earlier model KLA 2132.[1][2]
What it is
The KLA 2135 is a wafer inspection system used in semiconductor manufacturing. The KLA 2135 incorporates advanced sensor and image processing technologies. The KLA 2135 detects yield-relevant defects on all process layers with high capture rates, automatically and consistently. The KLA 2135 offers a two- to three-times throughput improvement over the earlier model KLA 2132. The KLA 2135 belongs to the KLA 2135 family of metrology and inspection equipment.[1][4][2]
How it works
Where it fits in the process flow
Applications
The KLA 2135 is used for detection of all types of yield-relevant defects on every process layer. The KLA 2135 supports complete yield correlation and yield strategy implementation. The KLA 2135 is suited to in-line monitoring of advanced processes.[1]
- in-line monitoring of advanced processes
- detecting yield-relevant defects on all process layers
What do the numbers mean?
Power & electrical2
Wafer handling1
Optics & imaging3
Performance2
Configuration & options7
Vintage & configurations
What replaced it?
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the KLA 2135?
The KLA 2135 is a wafer inspection system that uses advanced sensor and image processing technologies to detect yield-relevant defects on all process layers.[1][4]
How does the throughput of the KLA 2135 compare with the earlier model KLA 2132?
The KLA 2135 offers a two- to three-times throughput improvement over the earlier model KLA 2132.[1]
What inspection method does the KLA 2135 use?
The KLA 2135 uses brightfield, small-pixel, high data rate, digital image processing technology.[1]
What defect types can the KLA 2135 detect?
The KLA 2135 can detect all types of yield-relevant defects, covering handling, tooling, and process defects, at all process layers.[1]
What process nodes is the KLA 2135 targeted at?
The KLA 2135 targets semiconductor process nodes from 90 nm down to 28 nm.[3]
Not publicly documented
The following facts about the 2135 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 2135 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 2135 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 2135 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 2135 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 2135 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]KLA 2135 vs KLA 2350 | Waferpedia — waferpedia.comwaferpedia.com
- [3]caladansemi.com — caladansemi.comcaladansemi.com
- [4]KLA 2135 family | Waferpedia — waferpedia.comwaferpedia.com
Last updated Sep 25, 2026.
Compare with similar tools
View all →The KLA .204 PSL Wafer is an 8-inch NIST-traceable reference wafer compatible with Surfscan 6xy0 and Sp1 particle counters.
KLA .496 PSL Wafer is an 8-inch NIST traceable wafer stated to be capable on Surfscan 6xy0 and SP1.
The KLA .498 PSL Wafer is a NIST traceable reference wafer.
