Axcelis
NV GSD HE
The Axcelis NV GSD HE is an ion implantation system. The Axcelis NV GSD HE can handle 6-inch wafers and can be converted to handle 8-inch wafers. The Axcelis NV GSD HE configuration includes an end station, disk module, final energy magnet, linac module, gas box, and source.[1][2][3]
Wafer size
8"
Power
High voltage power supply[1]
Vacuum
Both front and rear Cyro pumps by the OEM[1]
Gas delivery
All gas box elements[1]
What it is
The Axcelis NV GSD HE is an ion implantation system.[2]
How it works
Where it fits in the process flow
Applications
General reference — not yet source-verifiedIon implantation is used to introduce controlled dopant species into semiconductor wafers.
The NV GSD HE is a mature-node wafer implantation tool class suited to semiconductor device fabrication on silicon wafers.
What do the numbers mean?
Power & electrical8
- Complete refurbishment of resonant cavities (LINACs, resonator DI boards and RF power supplies)[1]
- High voltage power supply[1]
- Terminal power supplies (filament, bias, arc, magnet, source magnet)[1]
- Refurbishment
- Complete refurbishment of resonant cavities (LINACs, resonator DI boards and RF power supplies)[1]
Vacuum & pumping10
Wafer handling3
Gas & chemistry6
Configuration & options25
- Refurbished[1]
- Refurbishment of isolation transformer[1]
- All assembly refurbished and fitted with new consumables[1]
- Chamber and beamline CO2 cleaned and diamond polished to return to as-new condition[1]
- Two new SAC IHC ion sources[1]
- System tested to original equipment manufacturers specification[1]
- Replacement of:[1]
- All water lines and fittings[1]
- Pneumatic lines where required (inspected)[1]
- 1 Chamber, 1 Load Port[3]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ConfigurationComplete refurbishment of resonant cavities (LINACs, resonator DI boards and RF power supplies)[1]
- ConfigurationBoth front and rear Cyro pumps by the OEM[1]
- ConfigurationValves, gate valves, and vacuum valves[1]
- ConfigurationMechanical and booster pumps[1]
- ConfigurationHigh voltage power supply[1]
- ConfigurationTerminal power supplies (filament, bias, arc, magnet, source magnet)[1]
- ConfigurationAll gas box elements[1]
- ConfigurationA low pressure H2 upgrade was performed:[1]
- ConfigurationNo gas stock management[1]
- RefurbishmentComplete refurbishment of resonant cavities (LINACs, resonator DI boards and RF power supplies)[1]
- ReplacementBoth front and rear Cyro pumps by the OEM[1]
- ReplacementValves, gate valves, and vacuum valves[1]
- ReplacementMechanical and booster pumps[1]
- ReplacementHigh voltage power supply[1]
- ReplacementTerminal power supplies (filament, bias, arc, magnet, source magnet)[1]
- ReplacementAll gas box elements[1]
- UpgradeA low pressure H2 upgrade was performed[1]
- UpgradeNo gas stock management[1]
- UpgradeBeam performances similar to H2 pressure technology[1]
- System configurationEnd station, disk module, final energy magnet, linac module, gas box, source[2]
- Power supplyHigh voltage power supply[1]
- Terminal power suppliesFilament, bias, arc, magnet, source magnet[1]
- Vacuum pumpsBoth front and rear Cryo pumps by the OEM[1]
- Gas deliveryAll gas box elements[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What wafer sizes can the NV GSD HE handle?
The NV GSD HE can handle 6-inch wafers and can be converted to handle 8-inch wafers.[1][2]
What are the main components of the NV GSD HE?
The configuration of the NV GSD HE includes an end station, disk module, final energy magnet, linac module, gas box, and source.[2][3]
Not publicly documented
The following facts about the NV GSD HE are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NV GSD HE are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the NV GSD HE are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the NV GSD HE are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the NV GSD HE are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the NV GSD HE is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
- [3]limitekltd.com — limitekltd.comlimitekltd.com
- [4]Inventory photo
Last updated Oct 3, 2026.
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