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Applied Materials

Centura DPS 2 532 Metal

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

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What it is

The Applied Materials Centura DPS 2 532 is a metal etcher designed for semiconductor manufacturing.[1]

How it works

General reference — not yet source-verified

The system maintains vacuum integrity throughout processing. Process gases are introduced into the chamber and partially ionized to form reactive species that chemically and physically etch the exposed metal. Endpoint detection typically monitors optical emission or reflectivity to determine when the metal layer is cleared.

Where it fits in the process flow

General reference — not yet source-verified

Upstream processes include metal deposition (sputtering or evaporation) and lithography to define the etch mask. Downstream steps involve resist removal, wet cleaning to eliminate sidewall residues, and metrology to verify critical dimensions and profile.

What do the numbers mean?

Configuration & options5

OEM
Applied Materials[1]
Accurate?
Model
Centura DPS 2 532[1]
Accurate?
Equipment type
Metal Etcher[1]
Accurate?
Asset #
81644[1]
Accurate?
Vintage
2006[1]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the Centura DPS 2 532 Metal are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Centura DPS 2 532 Metal are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Centura DPS 2 532 Metal are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Centura DPS 2 532 Metal are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Centura DPS 2 532 Metal are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Centura DPS 2 532 Metal is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
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Last updated Oct 4, 2026.

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