Waferpedia

Tool family

Ulvac NE-550

UlvacEtch1 entry

The Ulvac NE-550 is a multipurpose high-density, low-pressure plasma etching system used for chlorine etching.

Models in this family

  1. The Ulvac NE-550 is a multipurpose high-density, low-pressure plasma etching system used for chlorine etching.

    Cited variants

    DesignationGenerationVintageChangesSource
    NE-550H——NE-550H is a multipurpose high-density plasma etching system, specifically for R&D test facilities such as universities and government agencies.ulvac.eu[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]ulvac.euulvac.eu