Waferpedia

Tool family

Tokyo Electron TE 8500 SATC

Tokyo ElectronEtch1 entry
LinkedIn X Email

Models in this family

  1. TE 8500 SATC

    The Tokyo Electron TE 8500 SATC is a plasma etch system used in semiconductor manufacturing for the anisotropic removal of thin films during device patterning.

    Cited variants

    DesignationGenerationVintageChangesSource
    TE 8500 (S)ATC———Equipment inventory listing[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing