Tool family
The Lam / SEZ DV 34 is a wafer processing tool that supports 8-inch and 12-inch wafer sizes.
The Lam / SEZ DV 34 BF is a semiconductor etcher system with configuration options including 2 load ports and 4 chambers, with units manufactured between 2004 and 2010.
The Lam / SEZ DV 34 is a wafer processing tool that supports 8-inch and 12-inch wafer sizes.
The Lam / SEZ DV 34 BF is a semiconductor etcher system with configuration options including 2 load ports and 4 chambers, with units manufactured between 2004 and 2010.