Tool family
Lam Research Alliance A 6 Exelan HPT Dielectric
Models in this family
The Lam Alliance A 6 Exelan HPT is a dielectric etch system for 8-inch wafers, equipped with Exelan HPT chambers and a 4520 chamber.
Tool family
The Lam Alliance A 6 Exelan HPT is a dielectric etch system for 8-inch wafers, equipped with Exelan HPT chambers and a 4520 chamber.
