Tool family

Hitachi M 712 M 711 Dry Etch Process

Hitachi M 712 M 711 Dry Etch Process Chamber.

Models in this family

M 712 M 711 Dry Etch Process
The Hitachi M 712 / M 711 Dry Etch Process is an etch system for 12-inch wafers, available with configurations such as a bipolar ESC and Hitachi EPD monitor.
Cited variants
Designation Generation Vintage Changes Source
M 712 / M 711 — 2006–2006 Variant with gas configuration and ESC type Bipolar Equipment inventory listing^[1]

Designation	Generation	Vintage	Changes	Source
M 712 / M 711	—	2006–2006	Variant with gas configuration and ESC type Bipolar	Equipment inventory listing^[1]

Sources (1)Every fact above is drawn from these public sources