Wyko

400

Research Quality: 60% complete

The WYKO 400 is a laser interferometer for optical testing. The WYKO 400 offers a 100 mm test aperture, phase shifting capability, and optional 633 nm or 1.06 µm wavelength sources. The WYKO 400 provides peak-to-valley accuracy of λ/100 and repeatability of λ/300.^[1]^[2]

400 — web.archive.org — Fig. 01400web.archive.org^[1]

Performance

Simple twin spot alignment system^[1]

Optics

Laser interferometer^[1]

What it is

The WYKO 400 is a laser interferometer for optical measurement and testing.^[2]^[1]

The WYKO 400 uses a 100 mm test aperture, full 6X zoom, live fringe output, a twin spot alignment system, and phase shifting capability.^[2]^[1]

How it works

The WYKO 400 supports phase shifting operation, live fringe output, and alignment with a twin spot system.^[2]

Where it fits in the process flow

General reference — not yet source-verified

The WYKO 400 belongs in optical metrology rather than in wafer fabrication or film deposition.

The WYKO 400 is used for evaluating optics during inspection and characterization of parts that need surface or wavefront measurement.

Applications

The WYKO 400 evaluates a wide range of optics.^[2]

Optical testing
Evaluation of a wide range of optics

What do the numbers mean?

Optics & imaging2

Type: Laser interferometer^[1]
Wavelength sources: 633 nm or 1.06 µm^[1]

Performance6

Alignment system: Simple twin spot alignment system^[1]
Accuracy: Peak-to-valley accuracy of l/100^[1]
Repeatability: l/300^[1]
Accuracy (peak-to-valley): λ/100^[2]
Repeatability: λ/300^[2]
Alignment system: twin spot alignment^[2]

Configuration & options7

Test aperture: 100 mm (4 in.)^[1]
Zoom: Full 6X zoom^[1]
Display/output: Live fringe output^[1]
Measurement capability: Phase shifting capability^[1]
Optional apertures: 25.4 mm (1 in.) and 152.4 mm (6 in.)^[1]
Output: live fringe output^[2]
Phase shifting capability: yes^[2]

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Not publicly documented

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Frequently asked questions

What test aperture does the WYKO 400 use?

The WYKO 400 uses a 100 mm test aperture.^[2]

What measurement modes or features does the WYKO 400 include?

The WYKO 400 includes live fringe output, a twin spot alignment system, and phase shifting capability.^[2]

What performance figures are given for the WYKO 400?

The WYKO 400 has peak-to-valley accuracy of l/100 and repeatability of l/300.^[2]

Not publicly documented

The following facts about the 400 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 400 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 400 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 400 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 400 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 400 is not on record.
Answerable by: an OEM datasheet or a fab qualification report