Waferpedia

Comparison ledger

05 LHP 151versus400

Melles Griot 05 LHP 151, Wyko 400, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
05 LHP 151Melles Griot
400Wyko
OEMMelles GriotWyko
CategoryPrecision OpticsPrecision Optics
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyMelles Griot 05Wyko 400
Specifications
ConfigurationWith 05 LPL 340 Power Supply (Does not power on)[1]—
Equipment typeLaser[1]—
MakeMelles Griot[1]—
Model05 LHP 151[1]—
Power stateDoes not power on[1]—
Type—Laser interferometer[3]
Test aperture—100 mm (4 in.)[3]
Zoom—Full 6X zoom[3]
Display/output—Live fringe output[3]
Alignment system—Simple twin spot alignment system[3]
Measurement capability—Phase shifting capability[3]
Wavelength sources—633 nm or 1.06 µm[3]
Optional apertures—25.4 mm (1 in.) and 152.4 mm (6 in.)[3]
Accuracy—Peak-to-valley accuracy of l/100[3]
Repeatability—l/300[3]
Accuracy (peak-to-valley)—λ/100[4]
Output—live fringe output[4]
Phase shifting capability—yes[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]web.archive.orgweb.archive.org
  4. [4]web.archive.orgweb.archive.org