Ulvac
SRH 530
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Ulvac SRH 530 is a sputtering system for 4-inch wafers manufactured in 2013.[1]
What it is
The Ulvac SRH 530 is a sputtering system produced by Ulvac.[1]
How it works
General reference — not yet source-verifiedIn sputtering systems, a plasma is generated in a low-pressure gas atmosphere.
Ions from the plasma bombard a target material, ejecting atoms that deposit onto a substrate placed opposite the target.
Where it fits in the process flow
General reference — not yet source-verifiedSputtering systems are used in the deposition step of semiconductor fabrication.
Sputtered films serve as conductive layers, diffusion barriers, or seed layers for subsequent electrochemical deposition.
Applications
General reference — not yet source-verifiedSputtering systems are employed to deposit a wide range of materials including metals such as aluminum, copper, titanium, and tantalum, as well as oxides like silicon dioxide and indium tin oxide.
What do the numbers mean?
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the SRH 530 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
Fewer than 3 independently cited specifications for the SRH 530 are on record; the remainder await public documentation.
Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SRH 530 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the SRH 530 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the SRH 530 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the SRH 530 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
Last updated Sep 27, 2026.
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