Ulvac
SME 200
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
The SME 200 is manufactured by Ulvac, a supplier of vacuum and deposition equipment.[3]
How it works
General reference — not yet source-verifiedThe system typically includes a vacuum pump, a gas delivery system, a power supply to sustain the plasma, and a substrate holder. Some configurations use multiple targets for sequential deposition of different materials without breaking vacuum.
Applications
General reference — not yet source-verifiedSputter deposition is used to create thin films for integrated circuits, microelectromechanical systems (MEMS), solar cells, and optical coatings.
What do the numbers mean?
Configuration & options4
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| SME 200 J | — | — | 6-chamber configuration with target materials: PM2 platinum, PM3 BST, PM4 no chamber, PM5 BST, PM6 BST. | waferpedia.com[4] |
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of deposition system is the Ulvac SME 200?
The Ulvac SME 200 is a sputtering system used for thin film deposition.[3]
Not publicly documented
The following facts about the SME 200 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SME 200 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the SME 200 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the SME 200 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the SME 200 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the SME 200 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
- [2]Equipment inventory listing
- [3]waferpedia.com — waferpedia.comwaferpedia.com
- [4]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 9, 2026.
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