Ulvac
SIV 500
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Ulvac SIV 500 is an in-line sputtering system used for thin-film deposition, including indium tin oxide (ITO). The SIV 500 features a 3-station process module (P1, P2, P3) and a 5 kW pulsed DC power supply.[1][2]
What it is
The Ulvac SIV 500 is a sputtering deposition system.[3][2]
The Ulvac SIV 500 is a PVD deposition system.[2]
How it works
The Ulvac SIV 500 uses a three-station process module with a pulsed DC power supply.[1][2]
The Ulvac SIV 500 includes a dedicated P3 station for ITO or other transparent conductive films, together with oxygen mass-flow control and a 13.56 MHz power supply and match network to maintain ITO stoichiometry.[1][2]
Where it fits in the process flow
General reference — not yet source-verifiedThe Ulvac SIV 500 belongs in the thin-film deposition portion of the process flow, after substrate preparation and before later patterning or device integration steps.
Applications
What do the numbers mean?
Power & electrical6
Vacuum & pumping3
Wafer handling5
Dimensions & facilities1
Configuration & options7
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| SIV 500 ITO | — | 2016 | Configured for ITO sputtering with P3 dedicated to ITO, O₂ MFC, and 13.56 MHz power supply/match to maintain ITO stoichiometry. | tarasemi.com[1] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Pulsed DC power supply power5 kW[1]
- P3 sputtering power supply frequency13.56 MHz[1]
- Cryo pump size12 inch[1]
- Turbo/water pump size12 inch[1]
- Voltage208 VAC +/- 5%, 3 phase, 60 Hz, 3 wire plus ground, 145.5 A[2]
- Power supply5 kW pulsed DC[1]
- P3 dedicated toITO or other TCF with O₂ MFC and 13.56 MHz RF supply[1]
- Voltage208 VAC +/- 5%, 3 phase, 60 Hz, 145.5 A[2]
- PumpingRoughing pump, turbomolecular/water pump, Ulvac 12" cryo pump[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the SIV 500 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SIV 500 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the SIV 500 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the SIV 500 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the SIV 500 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the SIV 500 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]tarasemi.com — tarasemi.comtarasemi.com
- [2]fabsurplus.com — fabsurplus.comfabsurplus.com
- [3]Equipment inventory listing
Last updated Oct 7, 2026.
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