Waferpedia

Tokyo Electron

WDF DP

Test & ProbeTokyo Electron WDF DP family
Research Quality: 40% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

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What it is

General reference — not yet source-verified

Wafer probers are semiconductor test systems that position a wafer on a precision stage and bring probe needles into electrical contact with individual die pads, enabling electrical testing before the wafer is diced into chips.

How it works

General reference — not yet source-verified

A wafer prober holds the wafer on a vacuum chuck that can move in X, Y, Z and theta axes to align each die under a probe card. A probe card contains an array of fine needles or contact elements that press against the bond pads of the die. The prober uses an optical alignment system to locate alignment marks and correct for wafer distortion. Once contact is established, a tester device sends signals through the probe card to perform parametric or functional tests.

The system typically includes a wafer handler for automated loading and unloading, a temperature control system for hot and cold testing, and a computer interface for recipe management and data logging.

Where it fits in the process flow

General reference — not yet source-verified

The wafer prober is used in the wafer sort (or probe) step, which occurs after wafer fabrication and before assembly and packaging. After all front-end processing is complete, the wafer is transferred to a test floor where the prober aligns each die and the tester performs go/no-go or binning tests.

Downstream processes include wafer dicing, die attach, wire bonding or flip-chip assembly, and final testing. The wafer sort step eliminates known-bad dies early, improving packaging yield and overall manufacturing efficiency.

Applications

General reference — not yet source-verified

Probers are also employed in engineering development to debug new designs and in failure analysis to identify defect locations. Temperature testing (hot, cold, or temperature cycling) is commonly performed to evaluate device performance across operating conditions.

What do the numbers mean?

Wafer handling2

Equipment type
Wafer prober[2]
Accurate?
Product type
Wafer prober[2]
Accurate?

Configuration & options5

Defective[1]
Accurate?
Make
Tel[2]
Accurate?
Model
WDF DP[2]
Accurate?
OEM
Tokyo Electron[3]
Accurate?
Product category
Test[3]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What does a test and probe machine do?General reference — not yet source-verified

It makes controlled electrical contact to devices on a wafer so the devices can be measured before the wafer is separated into individual die.

What kind of contact does this class use?General reference — not yet source-verified

It generally uses fine probe elements or probe contacts that touch pads or test structures on the wafer surface.

Where is this equipment used in semiconductor manufacturing?General reference — not yet source-verified

It is used in wafer-level test between fabrication and downstream assembly or packaging steps.

What kinds of tests are performed with this class of machine?General reference — not yet source-verified

It is used for electrical screening, functional checks, continuity testing, and measurement of device characteristics.

Not publicly documented

The following facts about the WDF DP are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the WDF DP are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the WDF DP are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the WDF DP are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the WDF DP are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the WDF DP is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Equipment inventory listing
  3. [3]web.archive.org — tel.com (Apr 14, 2005)web.archive.org
  4. [4]Equipment inventory listing
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Last updated Sep 29, 2026.

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