Tokyo Electron
Alpha 303 i Vertical
The Tokyo Electron Alpha 303 i is a vertical furnace for 12-inch (300 mm) wafers. The Alpha 303 i is configured for TEOS, nitride, and cure processes.[1][2][3][4][5]
What it is
How it works
General reference — not yet source-verifiedA vertical furnace processes wafers in a stacked, upright chamber so that heat reaches the wafers in a controlled thermal environment. Furnaces of this class are used for thermal treatment steps that change film properties or drive material movement into or through the wafer surface.
Thermal and diffusion furnaces generally support process steps that depend on time, temperature, and ambient conditions rather than on direct pattern transfer. A vertical layout is commonly used to handle wafers in a compact chamber while maintaining process uniformity across a load.
What can it run?
Process applications and technology nodes documented for this tool.
- TEOS
- Nitride
- Cure
- Anneal
What do the numbers mean?
Wafer handling2
Configuration & options10
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Alpha 303 i Vertical are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Alpha 303 i Vertical are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Alpha 303 i Vertical are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Alpha 303 i Vertical are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Alpha 303 i Vertical are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Alpha 303 i Vertical is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (6)Every fact above is drawn from these public sources
- [1]inventory listing
- [2]Equipment inventory listing
- [3]inventory listing
- [4]Equipment inventory listing
- [5]inventory listing
- [6]inventory listing
Last updated Oct 9, 2026.
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