Tokyo Electron

78 S Automatic Wafer

Test & Probe Tokyo Electron 78 S Automatic Wafer family

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Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Tokyo Electron 78 S Automatic Wafer is an automatic wafer prober for 8-inch wafers.^[1]^[2]

Fig. — Manufacturer logo, not a photo of this toolWikimedia Commons (see file page for license)

What it is

The Tokyo Electron 78 S is an automatic wafer prober used in semiconductor test and probe operations.^[1]^[2]

The 78 S is manufactured by Tokyo Electron and is classified in the test and probe equipment category.^[2]

How it works

General reference — not yet source-verified

Automatic wafer probers position a wafer precisely under a set of probe needles to make electrical contact with individual die or test structures on the wafer surface.

A prober typically includes a wafer handling system, a stage with fine X-Y-θ positioning, a probe card interface, and pattern recognition or alignment optics to locate the test sites.

Where it fits in the process flow

General reference — not yet source-verified

Wafer probers are used after wafer fabrication is complete, during the wafer sort or electrical die sort stage of semiconductor manufacturing.

The prober is integrated with a tester that applies electrical signals and measures device parameters such as voltage, current, and logic functionality.

Applications

General reference — not yet source-verified

The 78 S automatic wafer prober is used for test and probe applications, including parametric testing, functional testing, and known-good-die screening.

What do the numbers mean?

Wafer handling2

Wafer size: 8 inch^[1]
Type: Automatic wafer prober^[1]

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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

Who manufactures the 78 S Automatic Wafer prober?

Tokyo Electron manufactures the 78 S Automatic Wafer prober.^[1]^[2]

What equipment category does the 78 S belong to?

The 78 S Automatic Wafer is classified under test and probe equipment.^[2]

Not publicly documented

The following facts about the 78 S Automatic Wafer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

Fewer than 3 independently cited specifications for the 78 S Automatic Wafer are on record; the remainder await public documentation.
Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 78 S Automatic Wafer are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 78 S Automatic Wafer are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 78 S Automatic Wafer are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 78 S Automatic Wafer are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician