Temescal

FCE-2500

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The Temescal FCE-2500 Fast-Cycle Evaporation System is a clean room compatible system with a load-lock system and fully automated or manual touch-screen control. The FCE-2500 combines high-throughput capability with lift-off compatibility. The FCE-2500 can be configured for freestanding or through-the-wall clean room installation.^[1]^[2]

TemescalFCE-2500

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Power

1100 lbs (500 kg)^[1]

Vacuum

3300 lbs (1500 kg)^[1]

What it is

The Temescal FCE-2500 is a fast-cycle evaporation system.^[1]

How it works

The Temescal FCE-2500 uses a load-lock system and supports fully automated or manual touch-screen control.^[1]

The Temescal FCE-2500 combines deposition sources, substrate fixturing, and substrate heating and cleaning devices in one vacuum platform.^[1]

Where it fits in the process flow

The Temescal FCE-2500 can be configured for freestanding installation or for through-the-wall clean room installation.^[1]^[2]

Applications

The Temescal FCE-2500 supports lift-off compatibility.^[1]^[2]

The Temescal FCE-2500 accommodates multiple electron beam and resistance-heated sources, and it supports ion milling and substrate heat options.^[2]

What do the numbers mean?

Power & electrical2

Dimensions: Power Supply Cabinet: Width 25.3 in (643 mm), Depth 27.0 in (686 mm), Height 72.0 in (1828 mm)^[1]
Weight: Power Supply Cabinet: 1100 lbs (500 kg)^[1]

Vacuum & pumping2

Dimensions: Vacuum Cubicle: Width 41.0 in (1054 mm), Depth 66.0 in (1680 mm), Height 81.0 in (2060 mm)^[1]
Weight: Vacuum Cubicle: 3300 lbs (1500 kg)^[1]

Wafer handling1

Options: Ion milling and substrate heat options available^[2]

Optics & imaging1

Accommodates: Multiple electron beam and resistance-heated sources^[2]

Control & software3

Dimensions: Control Cabinet: Width 24.0 in (610 mm), Depth 35.5 in (902 mm), Height 79.5 in (2019 mm)^[1]
Weight: Control Cabinet: 800 lbs (363 kg)^[1]
Control System: Temescal PC/PLC Control System with color touchscreen; three modes: Service, Manual, Automatic^[1]

Dimensions & facilities3

Dimensions: Product Chamber: Width 28 in (711 mm), Depth 28 in (711 mm), Height 18 in (457 mm)^[1]
Dimensions: Power Distribution Box (wall mounted): Width 31.5 in (800 mm), Depth 12.0 in (305 mm), Height 39.5 in (1004 mm)^[1]
Weight: Power Distribution Box: 176 lbs (80 kg) for 208-240 VAC systems; 300 lbs (136 kg) for 380+ VAC systems^[1]

Configuration & options13

Model: FCE-2500^[3]
System type: deposition system^[3]
Spare parts coverage: Listed among Temescal standard systems with spare parts kits^[3]
O-ring spares kit part no.: 0625-6200-0^[3]
Shields kit part no. for FCE-2500 SN 101-107: 0625-6570-0^[3]
Shields kit part no. for FCE-2500 SN 108 and above: 0625-6570-1^[3]
System type: Fast-Cycle Evaporation System^[1]
Product Chamber Volume: 231 liters^[1]
Source Chamber Diameter: 18 inches (457 mm)^[1]
Source Chamber Volume: 169 liters^[1]
O-ring spares kit part number: 0625-6200-0^[3]
Shields kit part number (SN 101-107): 0625-6570-0^[3]
Shields kit part number (SN 108 and above): 0625-6570-1^[3]

Vintage & configurations

Documented models & variants

Designation	Generation	Vintage	Changes	Source
FCE-2500 SN 101-107	—	—	Uses shields kit part number 0625-6570-0	web.archive.org^[3]
FCE-2500 SN 108 and above	—	—	Uses shields kit part number 0625-6570-1	web.archive.org^[3]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Dimensions: Vacuum CubicleWidth 41.0 in (1054 mm), Depth 66.0 in (1680 mm), Height 81.0 in (2060 mm)^[1]
Weight: Vacuum Cubicle3300 lbs (1500 kg)^[1]
Dimensions: Power Supply CabinetWidth 25.3 in (643 mm), Depth 27.0 in (686 mm), Height 72.0 in (1828 mm)^[1]
Weight: Power Supply Cabinet1100 lbs (500 kg)^[1]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What type of system is the FCE-2500?

The FCE-2500 is a fast-cycle evaporation system.^[1]

Does the FCE-2500 support manual and automatic operation?

The FCE-2500 supports fully automated operation and manual touch-screen control.^[1]

Can the FCE-2500 be installed in a through-the-wall configuration?

The FCE-2500 can be configured for through-the-wall clean room installation.^[1]^[2]

Not publicly documented

The following facts about the FCE-2500 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the FCE-2500 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the FCE-2500 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the FCE-2500 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the FCE-2500 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the FCE-2500 are on record.
Answerable by: an OEM parts catalog or a service engineer