Comparison ledger
ABM -407B-2-S-CE-S293 Robot, Temescal FCE-2500, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | FCE-2500Temescal | |
|---|---|---|
| OEM | ABM | Temescal |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | Temescal FCE-2500 |
| Cited variants | — | |
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[2] | FCE-2500[1] |
| Description | ROBOT[2] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[2] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[2] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[2] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[2] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[2] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[2] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[2] | — |
| System type | — | deposition system[1] |
| Spare parts coverage | — | Listed among Temescal standard systems with spare parts kits[1] |
| O-ring spares kit part no. | — | 0625-6200-0[1] |
| Shields kit part no. for FCE-2500 SN 101-107 | — | 0625-6570-0[1] |
| Shields kit part no. for FCE-2500 SN 108 and above | — | 0625-6570-1[1] |
| Dimensions: Vacuum Cubicle | — | Width 41.0 in (1054 mm), Depth 66.0 in (1680 mm), Height 81.0 in (2060 mm)[3] |
| Weight: Vacuum Cubicle | — | 3300 lbs (1500 kg)[3] |
| Dimensions: Product Chamber | — | Width 28 in (711 mm), Depth 28 in (711 mm), Height 18 in (457 mm)[3] |
| Product Chamber Volume | — | 231 liters[3] |
| Source Chamber Diameter | — | 18 inches (457 mm)[3] |
| Source Chamber Volume | — | 169 liters[3] |
| Dimensions: Control Cabinet | — | Width 24.0 in (610 mm), Depth 35.5 in (902 mm), Height 79.5 in (2019 mm)[3] |
| Weight: Control Cabinet | — | 800 lbs (363 kg)[3] |
| Dimensions: Power Supply Cabinet | — | Width 25.3 in (643 mm), Depth 27.0 in (686 mm), Height 72.0 in (1828 mm)[3] |
| Weight: Power Supply Cabinet | — | 1100 lbs (500 kg)[3] |
| Dimensions: Power Distribution Box (wall mounted) | — | Width 31.5 in (800 mm), Depth 12.0 in (305 mm), Height 39.5 in (1004 mm)[3] |
| Weight: Power Distribution Box | — | 176 lbs (80 kg) for 208-240 VAC systems; 300 lbs (136 kg) for 380+ VAC systems[3] |
| Accommodates | — | Multiple electron beam and resistance-heated sources[4] |
| Options | — | Ion milling and substrate heat options available[4] |
| Control System | — | Temescal PC/PLC Control System with color touchscreen; three modes: Service, Manual, Automatic[3] |
| O-ring spares kit part number | — | 0625-6200-0[1] |
| Shields kit part number (SN 101-107) | — | 0625-6570-0[1] |
| Shields kit part number (SN 108 and above) | — | 0625-6570-1[1] |