Waferpedia

Takatori

MWS 610 SD

Dicing & GrindingTakatori MWS 610 family
Research Quality: 50% complete

The Takatori MWS 610 SD is a wire saw used for dicing semiconductor materials. The Takatori MWS 610 SD features a high rocking angle of ±3°, a 24-gallon slurry supply tank with pump and agitator, and load cell electronic control.[1][2][3][4][5]

MWS 610 SD — Inventory photo
Fig. 01MWS 610 SDInventory photo[1]

What it is

General reference — not yet source-verified

Wire saws are machines used to slice ingots of brittle materials into thin wafers. The Takatori MWS 610 SD is a wire saw of this class.

How it works

The Takatori MWS 610 SD includes a slurry supply tank with pump and agitator, a slurry temperature controller, and a slurry flow meter control system. The machine also has a spindle axis temperature controller and a high rocking angle of ±3°. Load cell electronic control is provided.[1][2][3][4][5]

Where it fits in the process flow

General reference — not yet source-verified

Wire saws are typically used in the wafer manufacturing process after ingot growth and before further processing such as grinding and polishing. The Takatori MWS 610 SD is used in this step.

What do the numbers mean?

Vacuum & pumping1

Slurry supply tank with pump and agitator: 24 gal[1]
Accurate?

Gas & chemistry6

Slurry temperature controller[1]
Accurate?
Slurry flow meter control system[1]
Accurate?
Slurry supply tank capacity
24 gallons[1]
Accurate?
Slurry supply tank capacity
24 gal[1]
Accurate?
Slurry temperature controller
Present[1]
Accurate?
Slurry flow meter control system
Present[1]
Accurate?

Control & software7

Spindle axis temperature controller[1]
Accurate?
Load cell electronic control[1]
Accurate?
HDD Included (but completely wiped) without software for operation[1]
Accurate?
Electric control cabinet[3]
Accurate?
Spindle axis temperature controller
Present[1]
Accurate?
Load cell electronic control
Present[1]
Accurate?
Electric control cabinet
Present[3]
Accurate?

Configuration & options19

Operating Hours
35076[1]
Accurate?
High rocking angle
± 3°[1]
Accurate?
Disposable reel adapter[1]
Accurate?
Operating Hours
35549[2]
Accurate?
Operating Hours
36028[3]
Accurate?
Power transformer[3]
Accurate?
Rocking bearing system[3]
Accurate?
Ball screw system for work table[3]
Accurate?
Operating Hours
39072[4]
Accurate?
Operating Hours
38357[5]
Accurate?
Operating Hours
41578[6]
Accurate?
Operating Hours
35076 (source 1), 35549 (source 2), 36028 (source 3), 39072 (source 4), 38357 (source 5)[1]
Accurate?
Rocking angle
±3°[1]
Accurate?
Vintage year
2017[1]
Accurate?
Disposable reel adapter
Present[1]
Accurate?
Power transformer
Present[3]
Accurate?
Rocking bearing system
Present[3]
Accurate?
Ball screw system for work table
Present[3]
Accurate?
Vintage
2017[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ConfigurationSlurry supply tank with pump and agitator: 24 gal[1]
  • ConfigurationSlurry temperature controller[1]
  • ConfigurationSlurry flow meter control system[1]
  • Slurry supply tank capacity24 gallons[1]
  • Slurry supply tank capacity24 gal[1]
  • Slurry temperature controllerPresent[1]
  • Slurry flow meter control systemPresent[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What is the maximum rocking angle of the MWS 610 SD?

The maximum rocking angle is ±3°.[1][2][3][4][5]

Does the MWS 610 SD include a slurry temperature controller?

Yes, the machine includes a slurry temperature controller.[1][2][3][4][5]

Does the MWS 610 SD have load cell electronic control?

Yes, the machine has load cell electronic control.[1][2][3][4][5]

Not publicly documented

The following facts about the MWS 610 SD are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MWS 610 SD are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the MWS 610 SD are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the MWS 610 SD are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the MWS 610 SD are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the MWS 610 SD is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (6)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]inventory listing
  3. [3]Inventory photo
  4. [4]inventory listing
  5. [5]inventory listing
  6. [6]inventory listing
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Last updated Sep 26, 2026.

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