SPTS
Sigma
The SPTS Sigma is a PVD system. The SPTS Sigma is configured for 6-inch wafers. The SPTS Sigma includes a 1KW lamp for wafer heating.[1][2]
What it is
The SPTS Sigma is a physical vapor deposition system.[1][3]
The Sigma product range supports wafer sizes from 100 mm to 300 mm.[4]
How it works
The Sigma product range covers conventional PVD through advanced high-fill PVD and MOCVD-based metal deposition.[4]
The Sigma system can use sputter modules and magnetron-based deposition chambers, and the product family also includes pre-heat and soft sputter etch stations in some configurations.[1][2]
Where it fits in the process flow
The Sigma product range serves MEMS, advanced packaging, power semiconductors, photonics, and RF devices.[4]
Applications
The Sigma product range covers conventional PVD for low topography features, advanced Hi-Fill PVD for high aspect ratio features, and MOCVD-based metal coverage for advanced liner and barrier films.[4]
The Sigma product family is applied to MEMS fabrication, advanced packaging, power electronics, RF and mmWave ICs, and micro-LED and display backplanes.[5]
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Computer system does not boot up
What do the numbers mean?
Power & electrical7
Vacuum & pumping5
Wafer handling6
- Cassette 1[1]
Control & software2
Configuration & options24
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- PhasePower Box (415 VAC, 3 Phase)[1]
- ConfigurationPSU Power Supplies[1]
- ConfigurationCryo Compressors[1]
- Station 1Vacuum Cassette Handler (VCH)[1]
- ConfigurationPfeiffer TPH 062 turbo pump & TCP121 controller[1]
- ConfigurationMDX II Advanced Energy 15 KW DC power supply[1]
- Power box415 VAC, 3 Phase[1]
- Base pressure7E-8 Torr[1]
- Station 4 RF generatorAdvanced energy RFX-600 13.56 MHz RF generator[1]
- Station 5 RF generatorAdvanced energy RFX-600 A 13.56 MHz RF generator[1]
- Station 6Vacuum Cassette Handler (VCH)[1]
- Station 5 RF generatorAdvanced energy RFX-600 13.56 MHz RF generator[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What are the typical deposition rates achievable with PECVD systems of this class?General reference — not yet source-verified
Deposition rates for PECVD systems generally range from a few nanometers per minute up to several hundred nanometers per minute, depending on the film material, process conditions, and chamber design. Rates are influenced by RF power, gas flow ratios, pressure, and temperature, and can be optimized for either high throughput or precise film thickness control.
Not publicly documented
The following facts about the Sigma are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Sigma are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Sigma are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Sigma are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the Sigma is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Sigma are on record.
Answerable by: an OEM parts catalog or a service engineer
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Sigma — SPTS | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
- [3]SPTS Advances Power Devices with Sigma® fxP PVD System | Innovation | KLA — kla.comkla.com
- [4]Metal Deposition | SPTS — spts.com (Dec 4, 2020)web.archive.org
- [5]SPTS Sigma® Physical Vapor Deposition System - InstrumentHive — instrumenthive.cominstrumenthive.com
Last updated Oct 7, 2026.
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