Waferpedia

Rorze

RR 700 L 150 Z 30

CMPRorze RR 700 L 150 Z 30 family
Research Quality: 40% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Rorze RR 700 L 150 Z 30 is a single-arm robot. The Rorze RR 700 L 150 Z 30 is compatible with the AMAT Mirra Mesa CMP system. The Rorze RR 700 L 150 Z 30 handles 6-inch wafers.[1][2][3]

RorzeRR 700 L 150 Z 30
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What it is

The Rorze RR 700 L 150 Z 30 is a single-arm robot for CMP handling.[1][2][3]

The RR 700 L 150 Z 30 is compatible with the AMAT Mirra Mesa CMP system.[1][2][3]

How it works

General reference — not yet source-verified

A CMP robot moves wafers between a carrier interface and the polisher input and output stations.

A dry robot used in CMP handling transfers wafers into the polishing tool and then removes them for later handling steps.

Where it fits in the process flow

The RR 700 L 150 Z 30 sits alongside CMP polishing tools.[3]

The RR 700 L 150 Z 30 is used with 6 inch wafers and 200 mm wafers.[1][2][3]

Applications

The RR 700 L 150 Z 30 is used with AMAT Mirra Mesa CMP handling.[1][2][3]

What do the numbers mean?

Wafer handling7

Wafer size
6 inch[1]
Accurate?
Wafer size (alternate variant)
200mm[2]
Accurate?
Application type
SMIF robot[2]2 sources
Accurate?
Application type
Dry robot for Mirra, Mesa, OnTrak fabs[4]
Accurate?
Wafer size (base model)
6 inch[1]
Accurate?
Robot type
Dry robot[4]2 sources
Accurate?
Wafer handling size
200 mm[3]
Accurate?

Configuration & options7

Single Arm, compatible with AMAT Mirra Mesa CMP[1]
Accurate?
Arm configuration
Single arm[1]
Accurate?
Compatible systems
AMAT Mirra Mesa CMP[1]
Accurate?
Manufacturer
Rorze[1]
Accurate?
Model
RR 700 L 150 Z 30[1]
Accurate?
Category
CMP[3]
Accurate?
Compatibility
AMAT Mirra Mesa CMP[1]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
RR700L150-Z30-01——200mm wafer sizetarasemi.com[2]
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

Is the robot compatible with a specific CMP tool?

Yes, the robot is compatible with the AMAT Mirra Mesa CMP tool.[1][2][3][4]

How many arms does the robot have?

The robot has a single arm.[1][2]

What type of robot is it?

The robot is a SMIF robot and is classified as a dry robot.[2][4]

Not publicly documented

The following facts about the RR 700 L 150 Z 30 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the RR 700 L 150 Z 30 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the RR 700 L 150 Z 30 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the RR 700 L 150 Z 30 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the RR 700 L 150 Z 30 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the RR 700 L 150 Z 30 are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]tarasemi.com — tarasemi.comtarasemi.com
  3. [3]waferpedia.com — waferpedia.comwaferpedia.com
  4. [4]shop.entrepix.com — shop.entrepix.comshop.entrepix.com
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Last updated Oct 8, 2026.

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