Comparison ledger
Rorze RR 700 L 150 Z 30, Strasbaugh 100R16, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | RR 700 L 150 Z 30Rorze | 100R16Strasbaugh |
|---|---|---|
| OEM | Rorze | Strasbaugh |
| Category | CMP | CMP |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Rorze RR 700 L 150 Z 30 | Strasbaugh 100R16 |
| Cited variants |
| — |
| Specifications | ||
| Configuration | Single Arm, compatible with AMAT Mirra Mesa CMP[2] | — |
| Wafer size | 6 inch[2] | — |
| Wafer size (alternate variant) | 200mm[1] | — |
| Arm configuration | Single arm[2] | — |
| Compatible systems | AMAT Mirra Mesa CMP[2] | — |
| Application type | SMIF robot[1] | — |
| Wafer size (base model) | 6 inch[2] | — |
| Robot type | Dry robot[3] | — |
| Manufacturer | Rorze[2] | — |
| Model | RR 700 L 150 Z 30[2] | — |
| Category | CMP[4] | — |
| Wafer handling size | 200 mm[4] | — |
| Compatibility | AMAT Mirra Mesa CMP[2] | — |
| type | — | 1 spindle grinder/polisher[5] |
| drive system | — | DC drive system with 2 motors[5] |
| spindle RPM | — | 1-180 RPM[5] |
| eccentric RPM | — | 1-90 RPM[5] |
| controls | — | digital timer; air down switch; spindle and eccentric speed dials; air regulators[5] |
| capacity | — | 16 inches[5] |
| spindle size | — | 1-8 TPI[5] |
| overall dimensions | — | 28 inches x 36 inches x 48 inches[5] |
| weight | — | 500 lbs[5] |
| origin | — | made in the USA[5] |