Pfeiffer
Alcatel Adixen AMS 200 DRIE
The Pfeiffer / Alcatel Adixen AMS 200 DRIE is a single-wafer deep reactive ion etch system for 8-inch wafers. The AMS 200 uses RF power of 5 kW and platen power of 3 kW. The AMS 200 supports process gases including Ar, O2, N2, C4F8, SF6, and He.[1]
Wafer size
Single-Wafer Chamber for Deep Silicon Etch
Power
400 V, 50/60 Hz, 3-Phase[1]
Vacuum
No[1]
Gas delivery
Ar, O2, N2, C4F8, SF6 & He[1]
What is it?
What do the numbers mean?
Power & electrical5
Vacuum & pumping5
Wafer handling4
Gas & chemistry1
Configuration & options6
Observed configurations
How individual machines were equipped when they appeared on the secondary market — as listed, per unit. These describe one specific machine, not the model in general.
Unit as listed[1]
- Auto load/unload with 1 robot from cassette to chamber
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Power400 V, 50/60 Hz, 3-Phase[1]
- Electrical Feed480 VAC to Tool[1]
- Tool Supply208 V, 500 A, 3-Phase, 4-Wire[1]
- Process GasesAr, O2, N2, C4F8, SF6 & He[1]
- RF Power5 kW[1]
- Platen Power3 kW[1]
- Cryogenic CoolingNo[1]
- Turbo PumpRemoved / Not Included[1]
- Roughing PumpRemoved / Not Included[1]
- ForelineRemoved[1]
- Vacuum & Air UtilitiesYes[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What are the RF power and platen power specifications?
The RF power is 5 kW and the platen power is 3 kW.[1]
Does the AMS 200 include cryogenic cooling?
No, the system does not use cryogenic cooling; it is equipped with a standalone chiller.[1]
Is the AMS 200 a single‑wafer system?
Yes, it has a single‑wafer chamber with an auto load/unload robot.[1]
What electrical supply is required for the AMS 200?
The tool requires a 400 V, 50/60 Hz, three‑phase power input, with a 480 VAC tool feed and a 208 V, 500 A, three‑phase, four‑wire system supply.[1]
Not publicly documented
The following facts about the Alcatel Adixen AMS 200 DRIE are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Alcatel Adixen AMS 200 DRIE are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Alcatel Adixen AMS 200 DRIE are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Alcatel Adixen AMS 200 DRIE are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Alcatel Adixen AMS 200 DRIE are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Alcatel Adixen AMS 200 DRIE is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Inventory photo
Last updated Sep 23, 2026.
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