OAI
6000
Plate 01OAI Model 6000 Mask Aligner System
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What it is
The OAI 6000 is an automated front and backside mask aligner system for production use.[3]
How it works
General reference — not yet source-verifiedA mask aligner is a lithography tool that brings a photomask and a substrate into alignment before exposure so a pattern can be transferred onto a light-sensitive layer.
An automated mask aligner generally uses controlled wafer handling, alignment optics, and exposure control to support repeatable pattern transfer on production substrates.
Where it fits in the process flow
The OAI 6000 integrated lithography cell includes coat, bake, align and expose, and develop functions in one linked system.[1]
Applications
The OAI 6000 is intended for production semiconductors, MEMS, sensors, advanced packaging, IoT, and microfluidics.[3]
- Semiconductors
- MEMS
- Sensors
- Advanced packaging
- Microfluidics
What do the numbers mean?
Wafer handling5
- Cluster configuration allows dynamic wafer flow and parallel application processing[1]
Optics & imaging2
Control & software1
- Control interface
- Single terminal for control over recipe and program selection; P9000 performs as the master user interface[1]
Dimensions & facilities1
Configuration & options9
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What process steps are combined in the OAI 6000 integrated lithography cell?
The OAI 6000 integrated lithography cell combines coat, bake, align and expose, and develop functions.[1]
What type of aligner is the OAI 6000?
The OAI 6000 is an automated front and backside mask aligner system for production use.[3]
How is control handled on the OAI 6000 system?
The OAI 6000 uses a single terminal for control over recipe and program selection, and the P9000 performs as the master user interface.[1]
Not publicly documented
The following facts about the 6000 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 6000 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 6000 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 6000 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 6000 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 6000 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]web.archive.org — web.archive.orgweb.archive.org
- [3]web.archive.org — web.archive.orgweb.archive.org
Last updated Oct 5, 2026.
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