Nikon

Optistation 3200 Wafer

Metrology & Inspection Wafer Hander:Nikon Optistation family

Research Quality: 50% complete

The Nikon Optistation 3200 Wafer is a wafer inspection system. The Nikon Optistation 3200 Wafer is specified for 12-inch wafers. The Nikon Optistation 3200 Wafer supports brightfield and darkfield inspection modes.^[1]^[2]

Optistation 3200 Wafer — Inventory photo — Fig. 01Optistation 3200 WaferInventory photo^[1]

Wafer size

Wafer Hander:

Power

200 V±10%, 50/60 Hz^[1]

Vacuum

-55~-75 kPa or greater^[1]

Optics

5X, 10X, 20X, 50X, 100X, 150X^[1]

What it is

The Nikon Optistation 3200 Wafer is a wafer inspection system in the metrology and inspection category.^[1]^[3]

The Optistation 3200 Wafer is a 300 mm wafer inspection platform with microscope inspection, macro inspection, review inspection, and automated wafer handling functions.^[2]^[4]

How it works

The Optistation 3200 Wafer uses robotic handling, a vacuum chuck, and a noncontact pre-alignment mechanism to position wafers for inspection.^[2]

The Optistation 3200 Wafer supports brightfield, darkfield, differential interference contrast, and deep ultraviolet inspection modes.^[2]

The Optistation 3200 Wafer uses CFI60 optical design and objective lenses to produce magnified images for defect review and inspection.^[2]^[4]

Where it fits in the process flow

The Optistation 3200 Wafer integrates with factory automation through FOUP load ports and online operation interfaces.^[2]

Applications

The Optistation 3200 Wafer is used for particle detection, scratch detection, process defect review, and macro inspection of front and backside wafer surfaces.^[4]^[2]

The Optistation 3200 Wafer supports inspection of wafers in a 300 mm production environment.^[2]

What do the numbers mean?

Power & electrical2

Voltage: 200 V±10%, 50/60 Hz^[1]
Power: 200 V±10%, 50/60 Hz; 3 kVA; 1 phase 3 wire^[1]

Vacuum & pumping2

Vacuum: -55~-75 kPa or greater^[1]
Wafer transfer: Robotic handling; vacuum chuck; noncontact pre-alignment mechanism^[2]

Wafer handling4

Wafer size: Wafer Hander:^[1]; Robot^[1]
Model: Optistation 3200 Wafer^[1]
Wafer size: 12 inch^[1]

Optics & imaging4

Objective: 5X, 10X, 20X, 50X, 100X, 150X^[1]
Total magnification: 25x to 1,500x^[2]
Autofocus: LED illumination slit projection^[2]
Objectives: CFI60 objectives^[2]

Control & software2

Computer, keyboard, mouse, LCD^[1]

Accurate?

Controller^[1]

Accurate?

Dimensions & facilities2

Clearance: front:600, back:700, left:700, right:700^[1]
Dimensions: 1,625 x 2,500 x 2,300mm (Rear load port)^[2]

Configuration & options23

Pre-aligner^[1]; Arm^[1]
Loadport: 2 sets of 300mm (12inch) FOUP type^[1]
Stage movement range: 0 to 300mm^[1]
Eyepiece: 10X^[1]
Observation light: bright field, dark field^[1]; Power:^[1]
Phase: 3 kVA, 1 phase 3 wire^[1]; Flow 30 NL/min, 1/4'' tube^[1]
Temperature: 20-25*C^[1]
Relative Humidity: 40-60%^[1]
Make: Nikon^[1]
Category: Metrology & Inspection^[3]
Load port: 2 sets of 300mm (12inch) FOUP type^[1]
Flow: 30 NL/min, 1/4'' tube^[1]
Inspection modes: Brightfield, Darkfield, DIC (option), DUV (option)^[2]
Macro inspection: Surface Macro, center backside Macro, perimeter backside Macro^[2]
Load port: 2 FOUP; position selectable from side or rear^[2]
Operation: Touch panel GUI, mouse, keyboard^[2]
Options: DUV microscope; Hg-Xe lamp type (248nm)^[2]
Online operation: Via SECS-I or HSMS^[2]
Safety: S2-0302 compliance, CE marking compliance^[2]
Ergonomic: S8-0701 compliance^[2]

Interested in this tool?

Need help with this tool?Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Voltage200 V±10%, 50/60 Hz^[1]
Vacuum-55~-75 kPa or greater^[1]
Power200 V±10%, 50/60 Hz; 3 kVA; 1 phase 3 wire^[1]
Wafer transferRobotic handling; vacuum chuck; noncontact pre-alignment mechanism^[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Worked with this tool? Help preserve its knowledge →

Frequently asked questions

What wafer size does the Optistation 3200 Wafer support?

The Optistation 3200 Wafer supports ø300 mm wafers.^[2]

What inspection modes does the Optistation 3200 Wafer provide?

The Optistation 3200 Wafer provides brightfield, darkfield, DIC option, and DUV option inspection modes.^[2]

What are the optical magnification ranges of the Optistation 3200 Wafer?

The Optistation 3200 Wafer provides microscope inspection with total magnification from 25x to 1,500x and objective lenses including 5x, 10x, 20x, 50x, 100x, and 150x.^[2]

How many load ports does the Optistation 3200 Wafer have?

The Optistation 3200 Wafer has 2 FOUP load ports.^[2]

What automation interfaces are supported by the Optistation 3200 Wafer?

The Optistation 3200 Wafer supports online operation via SECS-I or HSMS and includes an OHV interface with SEMI E84 compliance.^[2]

Not publicly documented

The following facts about the Optistation 3200 Wafer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Optistation 3200 Wafer are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Optistation 3200 Wafer are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Optistation 3200 Wafer are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Optistation 3200 Wafer are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Optistation 3200 Wafer is not on record.
Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (4)Every fact above is drawn from these public sources

[1]Inventory photo
[2]nikonusa.com — nikonusa.comnikonusa.com
[3]waferpedia.com — waferpedia.comwaferpedia.com
[4]Nikon Optistation-3200 Wafer Inspection System User Manual — generalmanual.comgeneralmanual.com