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Nikon

LV100ND

Metrology & InspectionNikon LV100ND family
Research Quality: 40% complete
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What it is

General reference — not yet source-verified

The LV100ND belongs to the class of upright, reflected-light optical microscopes used for high-resolution inspection and measurement of surfaces. Such systems are commonly employed for defect detection, dimensional verification, and critical feature review on wafers, photomasks, and other processed substrates.

What can it run?

Process applications and technology nodes documented for this tool.

  • Optical inspection
  • Brightfield imaging
  • Darkfield imaging
  • Differential interference contrast imaging
  • Point-to-point distance measurement

What do the numbers mean?

Optics & imaging6

Microscope type
Optical microscope[1]
Accurate?
Objectives
5X, 10X, 20X, 50X, and 100X Plan Fluor high numerical aperture lenses[1]
Accurate?
Camera
DS-Ri2 Nikon camera, high definition 18 megapixel[1]
Accurate?
Objectives
5X, 10X, 20X, 50X, 100X Plan Fluor high numerical aperture lenses[1]
Accurate?
Illumination
Top and bottom lighting using LED white light with adjustable intensity[1]
Accurate?
Camera
DS-Ri2 (18 Megapixel) on some configurations; also DS-Fi3 (5.9 Megapixel) and Digital Sight 10 (23.9 Megapixel) on others[1]
Accurate?

Control & software2

Software
Nikon NIS-Elements D Software[1]
Accurate?
Software
Nikon NIS-Elements D[1]
Accurate?

Configuration & options8

Lighting
Top and bottom lighting using LED white light with adjustable intensity[1]
Accurate?
Brightfield / darkfield
10X Ultra Wide Field brightfield and darkfield for all five lenses[1]
Accurate?
DIC
Selectable Nomarski Differential Interference Contrast for top-down lighting only[1]
Accurate?
Stage
6" x 4" XY stage with glass plate[1]
Accurate?
Condenser
Abbe condenser[1]
Accurate?
Instrument count and locations
Two microscopes in the Flexible Cleanroom and two in the Nanopatterning Cleanroom[1]
Accurate?
Eyepiece
10X Ultra Wide Field[1]
Accurate?
DIC
Selectable Nomarski Differential Interference Contrast (for top down lighting only) on some configurations[1]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

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Frequently asked questions

What optical contrast methods are typically available?General reference — not yet source-verified

Common contrast methods include brightfield, darkfield, differential interference contrast (DIC), and polarized light. Some systems may also support fluorescence or confocal imaging for specialized applications.

Can this type of microscope perform automated measurements?General reference — not yet source-verified

Yes, many systems in this class can be equipped with motorized stages, auto-focus, and image analysis software to perform automated critical dimension measurements, defect mapping, and statistical process control.

What are typical maintenance requirements for such optical systems?General reference — not yet source-verified

Regular cleaning of optics, calibration of stage and focus mechanisms, and routine alignment checks are typical. Environmental control of temperature and humidity helps maintain measurement stability over time.

Not publicly documented

The following facts about the LV100ND are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the LV100ND are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the LV100ND are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the LV100ND are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the LV100ND are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the LV100ND is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]snsf.stanford.edu — snsf.stanford.edusnsf.stanford.edu
  2. [2]nano@stanford Equipment | nano@stanford — snf.stanford.edusnf.stanford.edu
  3. [3]Nanopatterning Cleanroom (NPC) | Stanford Nano Shared Facilities — snsf.stanford.edusnsf.stanford.edu
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Last updated Oct 7, 2026.

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