MKS
The MKS CH24P1 is a remote plasma source for high flow applications. The MKS CH24P1 has 24 kW RF power output. The MKS CH24P1 supports EtherCAT or analog DB25 communication.[1][2]
The CH24P1 uses a split-powered DC and RF architecture with a rack-mounted DC power supply and a remote toroidal applicator head.[2][4][5]
The CH24P1 generates remote plasma for NF3 destruction and for mixed gas species applications, and the product supports NF3, O2, N2, and Ar.[2][4][5]
The CH24P1 uses EtherCAT communication for key parameter streaming and supports analog control through a DB25 interface.[2][1][6]
The CH24P1 fits into larger atomic layer deposition chambers and quad-style chemical vapor deposition chambers used in semiconductor, flat panel display, and photovoltaic processes.[2][4][5]
The CH24P1 is positioned for chamber clean applications and for high flow mixed gas species applications, which places it in plasma-assisted chamber maintenance and process-support roles rather than in wafer patterning or deposition itself.[2][4][5]
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| RPS-CH24P1-P24C | — | — | Remote Plasma Source, 24 kW, High Flow Applications. | mks.com[1] |
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The following facts about the CH24P1 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the CH24P1 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the CH24P1 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the CH24P1 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the CH24P1 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the CH24P1 are on record.
Answerable by: an OEM parts catalog or a service engineer
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Last updated Oct 9, 2026.