Tool family
The CH24P1 is a 24 kW remote plasma source by MKS designed for high flow applications, featuring a compact split applicator power design and ±1% power set point accuracy.
The CH24P1 is a 24 kW remote plasma source by MKS designed for high flow applications, featuring a compact split applicator power design and ±1% power set point accuracy.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| RPS-CH24P1-P24C | — | — | Remote Plasma Source, 24 kW, High Flow Applications. | mks.com[1] |