Micro-Vu
311 HM Automated Precision Measurement
The Micro-Vu 311 HM Automated Precision Measurement System is a metrology and inspection tool. The Micro-Vu 311 HM Automated Precision Measurement System has a measurement capacity of 315 x 315 x 160 mm. The Micro-Vu 311 HM Automated Precision Measurement System includes accessories.[1][2]
What it is
How it works
General reference — not yet source-verifiedAutomated precision measurement systems operate by placing a part on a moving stage beneath an optical system that includes a camera and variable magnification lenses.
The system captures images of the part, and measurement software analyzes the images to extract dimensions and tolerances against a digital reference.
Where it fits in the process flow
General reference — not yet source-verifiedAutomated precision measurement systems are used in quality assurance and metrology laboratories to verify that manufactured components conform to design specifications.
Applications
General reference — not yet source-verifiedAutomated precision measurement systems are applied to the dimensional inspection of precision-machined parts, electronic components, and other small manufactured items.
In semiconductor and optics manufacturing, such systems measure features on masks, substrates, and micro-electromechanical structures.
What do the numbers mean?
Optics & imaging3
- 10kg - Scale Resolution: 031 um - XY Accuracy, E2: 2.6+L/175 - Z Accuracy, E1: 3.0+L/150 - Zoom Range: 19.5.1 or 36:1[1]
Performance2
Configuration & options4
- Includes accessories[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the 311 HM Automated Precision Measurement are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 311 HM Automated Precision Measurement are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 311 HM Automated Precision Measurement are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 311 HM Automated Precision Measurement are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 311 HM Automated Precision Measurement are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 311 HM Automated Precision Measurement is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]311 HM Automated Precision Measurement — Micro-Vu | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 4, 2026.
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