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KLA

OP 2600 DUV Film Thickness Measurement

KLA OP 2600 family
Research Quality: 30% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

OP 2600 DUV Film Thickness Measurement — Inventory photo
Fig. 01OP 2600 DUV Film Thickness MeasurementInventory photo[1]

What it is

The KLA OP 2600 DUV is a film thickness measurement system.[1][3]

Why won't it start?

Documented failure modes, common issues, and field considerations.

  • UV block is missing
  • One drive is missing

What do the numbers mean?

Configuration & options8

UV block is missing[1]
Accurate?
One missing drive[1]
Accurate?
Manufacturer
KLA / Therma-wave[1]
Accurate?
Model
OP 2600 DUV[1]
Accurate?
Equipment type
Film Thickness Measurement[1]
Accurate?
Vintage
1997[1]
Accurate?
Missing component
UV block[1]
Accurate?
Missing component
one drive[1]
Accurate?

Vintage & configurations

  1. 1997Vintage[1]

    Source states the equipment is 1997 vintage.

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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the OP 2600 DUV Film Thickness Measurement are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented variants, configuration options, or revision breakpoints of the OP 2600 DUV Film Thickness Measurement are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the OP 2600 DUV Film Thickness Measurement are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • The process node or technology generation of the OP 2600 DUV Film Thickness Measurement is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the OP 2600 DUV Film Thickness Measurement are on record.

    Answerable by: an OEM parts catalog or a service engineer

  • No publicly hosted manuals, SOPs, or datasheets for the OP 2600 DUV Film Thickness Measurement are on record.

    Answerable by: university cleanroom staff or an OEM application specialist

Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Inventory photo
  3. [3]OP 2600 DUV Film Thickness Measurement — KLA | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
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Last updated Oct 10, 2026.

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