KLA
Candela CS 20 V Surface Analyzer
The KLA Candela CS 20 V Surface Analyzer is a non‑destructive, laser‑based surface inspection and metrology system. The Candela CS 20 V uses a 405 nm violet laser (25 mW) to measure film thickness, detect particles as small as 0.08 µm, and identify surface defects such as scratches, pits, bumps, and stains. The Candela CS 20 V handles wafers from 2 to 8 inches and provides vertical topography resolution of 1 Å.[1][2]
What it is
How it works
Where it fits in the process flow
The Candela CS 20 V fits in wafer inspection and metrology flows after surface-relevant process steps that require checking film uniformity, particles, scratches, stains, pits, bumps, roughness, or waviness.[1]
The Candela CS 20 V handles semiconductor and related optoelectronic materials, including wafers with diameters from 2 inch to 8 inch.[2][1]
Applications
The Candela CS 20 V is used for film thickness uniformity analysis, particle detection, surface defect detection, and surface topography measurement.[1]
The Candela CS 20 V is used to detect scratches, stains, pits, bumps, micro-roughness, and waviness.[1]
The Candela CS 20 V uses a violet laser at 405 nm with 25 mW power and a spot size of 5 × 6 µm.[1][5]
What do the numbers mean?
Power & electrical2
Wafer handling12
- Wafer size
- Wafer Handling: - Sizes: 2", 3", 4", 5", 6", 8" - Thickness: 0.2–1.1 mm - Automatic robotic transfer - Cassette-to-cassette operation[1]
- Down to 0.08 µm (PSL equivalent) - ≥95% detection rate (on polished wafers)[1]
- Particle detection
- Down to 0.08 µm (PSL equivalent); ≥95% detection rate (on polished wafers)[1]
Optics & imaging8
Control & software2
Dimensions & facilities6
Configuration & options12
- Particle Detection:[1]
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Candela CS 20 V | — | — | — | Equipment inventory listing[5] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What wafer sizes does the Candela CS 20 V handle?
The Candela CS 20 V handles 2 inch, 3 inch, 4 inch, 5 inch, 6 inch, and 8 inch wafers.[1]
What inspection functions does the Candela CS 20 V provide?
The Candela CS 20 V provides film thickness uniformity analysis, particle detection, surface defect detection, and surface topography measurement.[1]
Not publicly documented
The following facts about the Candela CS 20 V Surface Analyzer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Candela CS 20 V Surface Analyzer are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Candela CS 20 V Surface Analyzer are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Candela CS 20 V Surface Analyzer are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Candela CS 20 V Surface Analyzer is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Candela CS 20 V Surface Analyzer are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]inventory listing
- [2]semistarcorp.com — semistarcorp.comsemistarcorp.com
- [3]Inventory photo
- [4]Inventory photo
- [5]inventory listing
Last updated Oct 11, 2026.
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